Patents by Inventor Kunal R. Parekh

Kunal R. Parekh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11937429
    Abstract: Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. A layer over the conductive levels includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus. In some embodiments the vertically-stacked conductive levels are wordline levels within a NAND memory array. Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. Vertically-stacked NAND memory cells are along the conductive levels within a memory array region. A staircase region is proximate the memory array region. The staircase region has electrical contacts in one-to-one correspondence with the conductive levels. A layer is over the memory array region and over the staircase region. The layer includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: March 19, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Justin B. Dorhout, Fei Wang, Chet E. Carter, Ian Laboriante, John D. Hopkins, Kunal Shrotri, Ryan Meyer, Vinayak Shamanna, Kunal R. Parekh, Martin C. Roberts, Matthew Park
  • Publication number: 20240087987
    Abstract: Systems and methods for a semiconductor device having a front-end-of-line structure are provided. The semiconductor device may include a dielectric material having a backside formed on a front side of a semiconductor substrate material and a front side, and an interconnect structure extending through the dielectric material. The interconnect structure may be electrically connected to a semiconductor memory array proximate the front side of the dielectric material. The semiconductor device may further have an insulating material encasing at least a portion of the semiconductor memory array and an opening created during back-end-of-line processing through which the active contact surface at the backside of the interconnect structure is exposed for electrical connection.
    Type: Application
    Filed: November 13, 2023
    Publication date: March 14, 2024
    Inventors: Kyle K. Kirby, Kunal R. Parekh
  • Patent number: 11929323
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure comprising a base structure, a doped semiconductive material overlying the base structure, a stack structure overlying the doped semiconductive material, cell pillar structures vertically extending through the stack structure and the doped semiconductive material and into the base structure, and digit line structures vertically overlying the stack structure. An additional microelectronic device structure comprising control logic devices is formed. The microelectronic device structure is attached to the additional microelectronic device structure to form a microelectronic device structure assembly. The base structure and portions of the cell pillar structures vertically extending into the base structure are removed to expose the doped semiconductive material. The doped semiconductive material is then patterned to form at least one source structure over the stack structure and coupled to the cell pillar structures.
    Type: Grant
    Filed: February 27, 2023
    Date of Patent: March 12, 2024
    Assignee: Micron Technology, Inc.
    Inventor: Kunal R. Parekh
  • Publication number: 20240071556
    Abstract: Methods, systems, and devices for memory with parallel main and test interfaces are described. A memory die may be configured with parallel interfaces that may individually (e.g., separately) support evaluation operations (e.g., before or as part of assembly in a multiple-die stack) or access operations (e.g., after assembly in a multiple die stack). For example, a memory die may include a first set of one or more contacts that support communicating signaling with or via another memory die in a multiple-die stack. The memory die may also include a second set of one or more contacts that support probing for pre-assembly evaluations, which may be electrically isolated from the first set of contacts. By implementing such parallel interfaces, evaluation operations may be performed using the second set of contacts without damaging the first set of contacts, which may improve capabilities for supporting a multiple-die stack in a memory device.
    Type: Application
    Filed: August 23, 2022
    Publication date: February 29, 2024
    Inventors: James Brian Johnson, Kunal R. Parekh, Brent Keeth, Eiichi Nakano, Amy Rae Griffin
  • Publication number: 20240072004
    Abstract: A semiconductor assembly is described that includes two semiconductor dies. The first semiconductor die includes a first layer of dielectric material at which a first portion of conductive material implementing a first portion of a passive circuit component is at least partially disposed. The second semiconductor die includes a second layer of dielectric material at which a second portion of conductive material implementing a second portion of the passive circuit component is at least partially disposed. A first contact pad at the first layer of dielectric material and a second contact pad at a second layer of dielectric material are coupled to create an interconnect electrically coupling the first semiconductor die and the second semiconductor die. A metal-metal bond is formed between the first portion of the passive circuit component and the second portion of the passive circuit component to create the passive circuit component.
    Type: Application
    Filed: August 23, 2023
    Publication date: February 29, 2024
    Inventors: Kyle K. Kirby, Kunal R. Parekh
  • Patent number: 11915742
    Abstract: A wafer-on-wafer formed memory and logic device can enable high bandwidth transmission of data directly between a memory die and a logic die. A logic die that is bonded to a memory die via a wafer-on-wafer bonding process can receive signals indicative of a genetic sequence from the memory die and through a wafer-on-wafer bond. The logic die can also perform a genome annotation lotic operation to attach biological information to the genetic sequence. An annotated genetic sequence can be provided as an output.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: February 27, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Sean S. Eilert, Kunal R. Parekh, Aliasger T. Zaidy, Glen E. Hush
  • Publication number: 20240063205
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure assembly comprising memory cells, digit lines coupled to the memory cells, contact structures coupled to the digit lines, word lines coupled to the memory cells, additional contact structures coupled to the word lines, and isolation material surrounding the contact structures and the additional contact structures and overlying the memory cells. An additional microelectronic device structure assembly is formed and comprises control logic devices, further contact structures coupled to the control logic devices, and additional isolation material surrounding the further contact structures and overlying the control logic devices.
    Type: Application
    Filed: October 20, 2023
    Publication date: February 22, 2024
    Inventors: Fatma Arzum Simsek-Ege, Kunal R. Parekh
  • Publication number: 20240063068
    Abstract: A semiconductor device assembly comprises a package substrate including (i) an upper surface having a plurality of internal contacts, (ii) a lower surface having a plurality of external contacts coupled to the plurality of internal contacts, and (iii) a cavity extending into the package substrate. The assembly further comprises a stack of first semiconductor devices disposed in the cavity, an uppermost first semiconductor device of the stack having a plurality of stack contacts, and an interposer including (i) a bottom surface having a first plurality of lower contacts coupled to the plurality of stack contacts and a second plurality of lower contacts coupled to the plurality of internal contacts, and (ii) a top surface having a plurality of upper contacts coupled to the first and second pluralities of lower contacts. The assembly further comprises a second semiconductor device including a plurality of die contacts coupled to the plurality of upper contacts.
    Type: Application
    Filed: August 19, 2022
    Publication date: February 22, 2024
    Inventors: Kunal R. Parekh, Bret K. Street, Terrence B. McDaniel, Jaekyu Song
  • Publication number: 20240063094
    Abstract: A semiconductor device includes a semiconductor substrate including a cavity and a peripheral region surrounding the cavity. The peripheral region includes a first surface and a second surface opposite the first surface. The cavity extends from the first surface partially through the semiconductor substrate to a third surface. The third surface is parallel to the first surface and is located between the first surface and the second surface. The semiconductor device also includes a plurality of through-silicon vias (TSVs) extending between the first surface and the third surface.
    Type: Application
    Filed: August 19, 2022
    Publication date: February 22, 2024
    Inventors: Terrence B. McDaniel, Kunal R. Parekh, Wei Zhou
  • Publication number: 20240055397
    Abstract: This document discloses techniques, apparatuses, and systems for providing a semiconductor device assembly with through-substrate connections for recessed semiconductor dies. A semiconductor device assembly is described that includes a substrate having a first cavity and a second cavity. A first connective element is located at a side surface of the first cavity and a second connective element is located at a side surface of the second cavity. The semiconductor device assembly include a first semiconductor die and a second semiconductor die implemented at the first cavity and the second cavity, respectively. The first semiconductor die includes a third connective element at an edge surface of the die. The second semiconductor die includes a fourth connective element at an edge surface of the die. The dies are implemented at the cavities and connected through the connective elements to electrically couple the first die to the second die.
    Type: Application
    Filed: August 9, 2022
    Publication date: February 15, 2024
    Inventors: Thiagarajan Raman, Kunal R. Parekh
  • Publication number: 20240057340
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a semiconductive base structure, and a memory array region vertically overlying the semiconductive base structure and comprising memory cells. The microelectronic device structure is attached to a base structure. A portion of the semiconductive base structure is removed after attaching the microelectronic device structure to a base structure. A control logic region is formed vertically over a remaining portion of the semiconductive base structure. The control logic region comprises control logic devices in electrical communication with the memory cells of the memory array region. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
    Type: Application
    Filed: October 20, 2023
    Publication date: February 15, 2024
    Inventor: Kunal R. Parekh
  • Publication number: 20240055400
    Abstract: This document discloses techniques, apparatuses, and systems for providing a semiconductor device assembly with a substrate for vertically assembled semiconductor dies. A semiconductor assembly is described that includes a semiconductor die coupled to a substrate such that an active surface of the semiconductor die is substantially orthogonal to a top surface of the substrate. The substrate includes a surface having a recessed slot at which a side surface of the semiconductor die couples. The semiconductor die includes a contact pad that couples to a contact pad at the recessed slot. In doing so, the techniques, apparatuses, and systems herein enable a robust and cost-efficient semiconductor device to be assembled.
    Type: Application
    Filed: August 9, 2022
    Publication date: February 15, 2024
    Inventors: Kunal R. Parekh, Bret K. Street, Kyle K. Kirby, Wei Zhou, Thiagarajan Raman
  • Publication number: 20240047450
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure assembly comprising memory cells, digit lines coupled to the memory cells, word lines coupled to the memory cells, and isolation material overlying the memory cells, the digit lines, and the word lines. An additional microelectronic device structure assembly comprising control logic devices and additional isolation material overlying the control logic devices is formed. The additional isolation material of the additional microelectronic device structure assembly is bonded to the isolation material of the microelectronic device structure assembly to attach the additional microelectronic device structure assembly to the microelectronic device structure assembly. The memory cells are electrically connected to at least some of the control logic devices after bonding the additional isolation material to the isolation material. Microelectronic devices, electronic systems, and additional methods are also described.
    Type: Application
    Filed: October 20, 2023
    Publication date: February 8, 2024
    Inventors: Fatma Arzum Simsek-Ege, Kunal R. Parekh
  • Publication number: 20240040775
    Abstract: A method of forming a microelectronic device comprises forming a first microelectronic device structure comprising a first semiconductor structure, a first isolation material over the first semiconductor structure, and first conductive routing structures over the first semiconductor structure and surrounded by the first isolation material. A second microelectronic device structure comprising a second semiconductor structure and a second isolation material over the second semiconductor structure is formed. The second isolation material is bonded to the first isolation material to attach the second microelectronic device structure to the first microelectronic device structure. Memory cells comprising portions of the second semiconductor structure are formed after attaching the second microelectronic device structure to the first microelectronic device structure. Control logic devices including transistors comprising portions of the first semiconductor structure are formed after forming the memory cells.
    Type: Application
    Filed: September 29, 2023
    Publication date: February 1, 2024
    Inventors: Fatma Arzum Simsek-Ege, Kunal R. Parekh, Terrence B. McDaniel, Beau D. Barry
  • Publication number: 20240015972
    Abstract: A microelectronic device comprises a stack structure, cell pillar structures, an active body structure, digit line structures, and control logic devices. The stack structure comprises vertically neighboring tiers, each of the vertically neighboring tiers comprising a conductive structure and an insulative structure vertically neighboring the conductive structure. The cell pillar structures vertically extend through the stack structure and each comprise a channel material and an outer material stack horizontally interposed between the channel material and the stack structure. The active body structure vertically overlies the stack structure and is in contact with the channel material of the cell pillar structures. The active body structure comprises a metal material having a work function greater than or equal to about 4.7 electronvolts. The digit line structures vertically underlie the stack structure and are coupled to the cell pillar structures.
    Type: Application
    Filed: September 25, 2023
    Publication date: January 11, 2024
    Inventors: Haitao Liu, Kunal R. Parekh
  • Publication number: 20240014170
    Abstract: A semiconductor device assembly can include an assembly substrate having a top surface, a top semiconductor device having a bottom surface, and a plurality of intermediary semiconductor devices. Each of intermediary semiconductor device can be bonded to both the assembly substrate top surface and the top device bottom surface. Each intermediary semiconductor device can also include a semiconductor substrate, a memory array, a first bond pad, a second bond pad, and a conductive column. The first bond pad can electrically couple the assembly substrate to the intermediary semiconductor device; the second bond pad can electrically couple the top semiconductor device to the intermediary semiconductor device; and the conductive column can electrically couple the first bond pad to the second bond pad, and can be exclusive of any electrical connection to the memory array.
    Type: Application
    Filed: July 5, 2022
    Publication date: January 11, 2024
    Inventors: Bharat Bhushan, Akshay N. Singh, Kunal R. Parekh
  • Patent number: 11862569
    Abstract: Systems and methods for a semiconductor device having a front-end-of-line interconnect structure are provided. The semiconductor device may include a dielectric material having a backside formed on a front side of a semiconductor or silicon substrate material and a front side, and a conducting material on the front side of the dielectric material. The conducting material may have a line portion and an interconnect structure electrically coupled to the line portion and separated from the front side of the substrate material by the dielectric material. The interconnect structure has a backside defining a contact surface. The semiconductor device may further include a semiconductor die proximate the front side of the dielectric material, an insulating material encasing at least a portion of the semiconductor die, and an opening through which the active contact surface at the backside of the interconnect structure is exposed for electrical connection.
    Type: Grant
    Filed: May 19, 2021
    Date of Patent: January 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Kyle K. Kirby, Kunal R. Parekh
  • Publication number: 20230413583
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure comprising a first control logic region comprising first control logic devices, and a first memory array region vertically overlying the first control logic region and comprising an array of vertically extending strings of memory cells. An additional microelectronic device structure comprising a semiconductive material is attached to an upper surface of the microelectronic device structure. A portion of the semiconductive material is removed. A second control logic region is formed over the first memory array region. The second control logic region comprises second control logic devices and a remaining portion of the semiconductive material. A second memory array region is formed over the second control logic region. The second memory array region comprises an array of resistance variable memory cells. Microelectronic devices, memory devices, and electronic systems are also described.
    Type: Application
    Filed: September 1, 2023
    Publication date: December 21, 2023
    Inventor: Kunal R. Parekh
  • Patent number: 11842990
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure assembly comprising memory cells, digit lines coupled to the memory cells, word lines coupled to the memory cells, and isolation material overlying the memory cells, the digit lines, and the word lines. An additional microelectronic device structure assembly comprising control logic devices and additional isolation material overlying the control logic devices is formed. The additional isolation material of the additional microelectronic device structure assembly is bonded to the isolation material of the microelectronic device structure assembly to attach the additional microelectronic device structure assembly to the microelectronic device structure assembly. The memory cells are electrically connected to at least some of the control logic devices after bonding the additional isolation material to the isolation material. Microelectronic devices, electronic systems, and additional methods are also described.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: December 12, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Kunal R. Parekh
  • Publication number: 20230395159
    Abstract: Interfaces between higher voltage and lower voltage wafers and related apparatuses and methods are disclosed. An apparatus includes a memory wafer and a logic wafer. Data storage elements of an array are configured to perform an operation responsive to an operational voltage potential. The memory wafer also includes bitlines electrically connected to the data storage elements and isolation devices electrically connected to the bitlines. The logic wafer is bonded to the memory wafer. The logic wafer includes logic circuitry electrically connected to the bitlines through the isolation devices. A maximum voltage potential difference tolerance of the logic circuitry is less than an operational voltage potential difference between the operational voltage potential and a reference voltage potential of the logic circuitry.
    Type: Application
    Filed: May 10, 2023
    Publication date: December 7, 2023
    Inventors: Michael A. Smith, Kunal R. Parekh, Hernan A. Castro