Patents by Inventor Kung-Teng Huang

Kung-Teng Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slurry dilution system with an ultrasonic vibrator capable of in-situ adjustment of slurry concentration
    Patent number: 6604849
    Abstract: A slurry dilution system with an ultrasonic vibrator capable of diluting slurry in-situ to any desired level of concentration is proposed. Raw slurry and the de-ionized water fed into the slurry dilution system is mixed and homogenized by an ultrasonic vibrator and a mixer. The well-mixed slurry solution is then delivered to a chemical-mechanical polishing station. When the chemical-mechanical station requires slurry of a different concentration, the raw slurry can be diluted to the desired level simply by changing the rate of flow of de-ionized water into the dilution system.
    Type: Grant
    Filed: May 11, 2001
    Date of Patent: August 12, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Bih-Tiao Lin, Meng-Feng Tsai, Rong Jye Jang, Kung-Teng Huang
  • Slurry dilution system with an ultrasonic vibrator capable of in-situ adjustment of slurry concentration
    Publication number: 20020048214
    Abstract: A slurry dilution system with an ultrasonic vibrator capable of diluting slurry in-situ to any desired level of concentration is proposed. Raw slurry and the de-ionized water fed into the slurry dilution system is mixed and homogenized by an ultrasonic vibrator and a mixer. The well-mixed slurry solution is then delivered to a chemical-mechanical polishing station. When the chemical-mechanical station requires slurry of a different concentration, the raw slurry can be diluted to the desired level simply by changing the rate of flow of de-ionized water into the dilution system.
    Type: Application
    Filed: May 11, 2001
    Publication date: April 25, 2002
    Inventors: Bih-Tiao Lin, Meng-Feng Tsai, Rong Jye Jang, Kung-Teng Huang