Abstract: Diamond-like thin films having high uniformity and high crystallinity are produced by introducing a hydrocarbon material gas into a chamber, ionizing the gas, and depositing the ionized gas on a substrate. The gas is ionized by thermionic emission from two or more files of hot cathodes, each file having a plurality of filaments arranged at substantially uniform intervals in a linear or zigzag line configuration. Each file of hot cathodes is surrounded separately by an anode at a substantially uniform distance from a respective file of the filaments.

Abstract: A highly corrosion-resistant rare-earth-iron magnet has a paraxylylene polymer film or a chloropara-xylylene polymer film formed thereon. The substrate magnet surface has a roughness Ra of no more than one micron. The magnet has a plasma polymer film formed beforehand or afterwards. The plasma polymer film has a protective film consists of only carbon and hydrogen, with a refractive index decreasing from the boundary surface between the film and the magnet toward the exposed surface. The protective coating has a thickness about three times the surface roughness of the substrate magnet.

Abstract: In a process for producing a diamond-like film which comprises introducing a hydrocarbon feed gas or a feed gas capable of producing a hydrocarbon on decomposition or reaction into a vacuum, ionizing the gas, and depositing the same on a substrate to form a diamond-like film thereon, the hydrocarbon gas is passed through a plasma exciter prior to the introduction into the vacuum. An apparatus for practicing the process comprises a plasma exciter means located on a passage through which the hydrocarbon gas is introduced into the vacuum.

Abstract: A mold including a cavity the inner surface of which is at least partly coated with a layer selected from a diamond-like film and layers of fluorine and fluorine compounds. The mold is manufactured by a method which comprises placing at least a part of the mold which constitutes the surface portion of the mold cavity in a vacuum film-forming chamber, introducing a hydrocarbon gas into the chamber, ionizing the gas, and then evaporating it onto a desired surface portion of the mold, thus forming a diamond-like film over the mold portion. The mold portion is surface-treated by ionizing a low-molecular-weight fluorine compound into a plasma, forming a fluorine polymer film from the plasma on at least a part of the cavity surface, while applying a bias voltage to the plasma.

Abstract: In a magnetic recording medium wherein a metal thin film magnetic layer and an overcoat are formed on a nonmagnetic substrate, durability is improved when the overcoat comprises a plasma-polymerized film and a topcoat of an organic fluorine compound; a plasma-polymerized film, a protective carbon film, and a topcoat of an organic fluorine compound; a plasma-polymerized film containing C, F and H; or a plasma-polymerized organometallic film and a fluorine or silicon-containing topcoat. Oxidation of the upper surface of the magnetic layer with a plasma is also effective.

Abstract: In a magnetic recording medium wherein a metal thin film magnetic layer and an overcoat are formed on a nonmagnetic substrate, durability is improved when the overcoat comprises a plasma-polymerized film and a topcoat of an organic fluorine compound; a plasma-polymerized film, a protective carbon film, and a topcoat of an organic fluorine compound; a plasma-polymerized film containing C, F and H; or a plasma-polymerized organometallic film and a fluorine or silicon-containing topcoat. Oxidation of the upper surface of the magnetic layer with a plasma is also effective.

Abstract: A plasma-polymerized film is formed by depositing and polymerizing a metal element-containing material forming an electrode and a gaseous polymerizable carbon-containing reactant in a plasma atmosphere. The polymerized film contains the metal element Mt and carbon C in an atomic ratio Mt/(C+Mt) of at least 1/100. The polymerized film is prepared under a condition W/(F.M) of at least 10.sup.8 joule/kg wherein W is a power applied for plasma generation in joule/sec., F is a flow rate of the gaseous reactant, and M is the molecular weight of the gaseous reactant, F.M being expressed in kg/sec. Such a polymerized film is advantageously applied as a coating to a surface of a member which constructs or is disposed in a casing in which a tape or disk-shaped medium is received for travel or rotating motion.

Abstract: A plasma-polymerized film covers a surface of a medium related member which constructs or is disposed in a casing in which a tape or disk-shaped recording medium is receiving for travel or rotating motion. The film contains C, F and at least one element of Si, B, P and N. The total content of F and at least one element of Si, B, P, and N ranges from 5 to 40 atom % of the film, and the atomic ratio of (Si+B+P+N)/F ranges from 2/10 to 5/1.

Abstract: A magnetic recording medium comprising a ferromagnetic metal thin film comprised predominantly of cobalt on a substrate is improved in durability and performance by forming the ferromagnetic metal thin film as a multi-layered structure including at least two layers, one or both of which contain an organic polymer. A plasma-polymerized film may be provided as an interlayer between the layers of the metal thin film or as a topcoat.

Abstract: In a magnetic recording medium comprising a substrate, a ferromagnetic metal thin film formed on the substrate, and a topcoat formed on the thin film, the topcoat comprises a plasma-polymerized film containing carbon and hydrogen with the atomic ratio of carbon to hydrogen being from 1 to 6, and an organic material film deposited on the plasma-polymerized film by evaporation.

Abstract: In a magnetic recording medium wherein a metal thin film magnetic layer and a topcoat layer of an organic fluorine compound are formed on a nonmagnetic substrate, the surface of the magnetic layer is plasma treated or plasma oxidized, enhancing the bond between the adjoining layers. A protective film of carbon may be disposed between the magnetic layer and the topcoat, with the surface of the protective carbon film plasma treated. Instead, a protective film of plasma-polymerized organometallic compound may be used.

Abstract: In a magnetic recording medium wherein a metal thin film magnetic layer and an overcoat are formed on a nonmagnetic substrate, durability is improved when the overcoat comprises a plasma-polymerized film and a topcoat of an organic fluorine compound; a plasma-polymerized film, a protective carbon film, and a topcoat of an organic fluorine compound; a plasma-polymerized film containing C, F and H; or a plasma-polymerized organometallic film and a fluorine or silicon-containing topcoat. Oxidation of the upper surface of the magnetic layer with a plasma is also effective.

Abstract: A magnetic recording medium comprising a substrate and a continuous thin film magnetic layer on the substrate is prevented from curling or cupping by incorporating a polymeric organic compound in the magnetic layer. An organic compound is introduced into the magnetic layer during its formation and polymerized with the aid of plasma or radiation. A topcoat is formed on the magnetic layer by plasma polymerizing an organic compound for further improvement.

Abstract: In a magnetic recording medium comprising a substrate, a ferromagnetic metal thin film formed on the substrate, and a topcoat formed on the thin film, the topcoat is a plasma-polymerized film containing carbon and hydrogen in an atomic ratio of C/H of from 1 to 6, and having a thickness of 10 to 40 angstroms and a contact angle with water in the range of from 60.degree. to 130.degree..

Abstract: A magnetic recording medium is provided comprising a non-magnetic substrate, a magnetic metal layer of continuous thin film type deposited on the substrate, and a topcoat film on the magnetic layer. The topcoat film is formed by sputtering or ion plating a fluorocarbon resin so that it consists essentially of carbon and fluorine, and fluorine atoms of the topcoat film are chemically combined with metal atoms of the magnetic layer in proximity to the interface.

Abstract: In a magnetic recording medium wherein a metal thin film magnetic layer, a protective film or carbon, and a topcoat layer are formed on a rigid substrate in this order, the topcoat layer is from an organic fluorine compound by gas phase deposition.

Abstract: A magnetic recording medium comprising a substrate, a plasma polymerized film, and a magnetic layer is improved in physical and electromagnetic properties when the plasma polymerized film is comprised of carbon, or carbon and at least one optional element selected from hydrogen, nitrogen and oxygen.

Abstract: In a magnetic recording medium comprising a magnetic layer in the form of predominantly cobalt ferromagnetic metal thin film on a plastic substrate, physical properties like strength and crack resistance as well as electromagnetic properties of the magnetic layer are improved by forming it as a multi-layered structure consisting of at least two layers, wherein the magnetic layer has a specific profile of oxygen concentration. The medium may be provided with a topcoat and/or backcoat layer.

Abstract: A magnetic recording medium comprising a substrate, a ferromagnetic metal thin film on the substrate, and a topcoat on the thin film exhibits improved strength and durability when the topcoat is comprised of a plasma-polymerized film prepared by activating a gaseous hydrocarbon monomer or a mixture thereof with a carrier gas into a plasma under specific conditions. The plasma-polymerized film consists of carbon and hydrogen in an atomic ratio of C/H of from 1:1 to 6:1 and has a thickness of 3 to 15 .ANG. and a contact angle with water in the range from 60.degree. to 120.degree.. An organic coating may be present on the plasma-polymerized film.

Abstract: A magnetic recording medium comprising a ferromagnetic metal thin film layer formed on one surface of a flexible non-magnetic substrate and primarily comprising cobalt and oxygen is improved in durability by treating the substrate with a plasma at a frequency of 10 kHz to 200 kHz, and providing the magnetic layer on the surface with protrusions having a height of 30 to 300 .ANG. at an average density of at least 10.sup.5 /a.sup.2 per square millimeter of the surface, provided that the magnetic recording medium is passed for recording/reproducing operation across a magnetic head with a gap having a distance a as expressed n .mu.m.