Patents by Inventor Kunihko Hinata

Kunihko Hinata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for reducing substrate backside deposition during processing
    Patent number: 8382942
    Abstract: A focus ring assembly configured to be coupled to a substrate holder comprises a focus ring and a secondary focus ring coupled to the focus ring, wherein the secondary focus ring is configured to reduce the deposition of process residue on a backside surface of the substrate.
    Type: Grant
    Filed: March 17, 2004
    Date of Patent: February 26, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Yasunori Hatamura, Kunihko Hinata