Abstract: A substrate processing system for performing processing on a plurality of substrates. The substrate processing system comprises: a processing unit comprising a plurality of processing modules each configured to perform a predetermined process; a transfer unit having a transfer device configured to transfer a substrate to each of the plurality of processing modules; a loading/unloading unit configured to hold a plurality of substrates and load/unload a substrate to/from the processing unit; and a controller configured to control the processing unit, the loading/unloading unit, and the transfer unit. The controller controls the transfer unit to transfer to the plurality of processing modules in a serial manner a plurality of substrates that are sequentially loaded from the loading/unloading unit to the processing unit, the controller further comprises a standby mode setting unit configured to set a standby period of the substrate at an appropriate timing depending on a content of the process.

Abstract: An imaging unit including a line sensor reads a film image to produce color decomposition data by scanning a plurality of lines on the film image in a stepped prescanning operation. During the prescanning operation, the color decomposition data of a plurality of pixels at each of a plurality of sampling points are sampled and added up on a line-by-line basis, and the added color decomposition data are averaged, where corrections including a shading correction are performed concurrently with the adding and averaging operations. During a period of from the end of the prescanning operation to the start of a main scanning operation, on the basis of the averaged color decomposition data, a density correction amount is determined and parameters to be used for correcting the film image in a succeeding actual image processing operation are calculated. The calculated parameters are set in a line memory.