Abstract: An inkjet printing head 1 includes an actuator substrate 2 having pressure chambers (cavities) 7, a movable film formation layer 10 including movable films 10A disposed above the pressure chambers 7 and defining top surface portions of the pressure chambers 7, and piezoelectric elements 9 formed above the movable films 10A. Each piezoelectric element 9 includes a lower electrode 11 formed above a movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. The piezoelectric film 12 includes an active portion 12A with an upper surface in contact with a lower surface of an upper electrode 13 and an inactive portion 12B led out in a direction along a front surface of the movable film formation layer 10 from an entire periphery of a side portion of the active portion 12A and having a thickness thinner than that of the active portion 12A.

Abstract: An inkjet printing head 1 includes an actuator substrate 2 having pressure chambers (cavities) 7, a movable film formation layer 10 including movable films 10A disposed above the pressure chambers 7 and defining top surface portions of the pressure chambers 7, and piezoelectric elements 9 formed above the movable films 10A. Each piezoelectric element 9 includes a lower electrode 11 formed above a movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. The piezoelectric film 12 includes an active portion 12A with an upper surface in contact with a lower surface of an upper electrode 13 and an inactive portion 12B led out in a direction along a front surface of the movable film formation layer 10 from an entire periphery of a side portion of the active portion 12A and having a thickness thinner than that of the active portion 12A.

Abstract: An inkjet printing head 1 includes an actuator substrate 2 having pressure chambers (cavities) 7, a movable film formation layer 10 including movable films 10A disposed above the pressure chambers 7 and defining top surface portions of the pressure chambers 7, and piezoelectric elements 9 formed above the movable films 10A. Each piezoelectric element 9 includes a lower electrode 11 formed above a movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. The piezoelectric film 12 includes an active portion 12A with an upper surface in contact with a lower surface of an upper electrode 13 and an inactive portion 12B led out in a direction along a front surface of the movable film formation layer 10 from an entire periphery of a side portion of the active portion 12A and having a thickness thinner than that of the active portion 12A.

Abstract: An ink jet print head 1 includes: a pressure chamber (cavity) 7; a movable film formation layer 10 arranged on the pressure chamber 7 and including a movable film 10A defining a ceiling surface portion of the pressure chamber 7; a piezoelectric element 9 formed on the movable film 10A and including a lower electrode 11, a piezoelectric film 12 formed on the lower electrode 11, and an upper electrode 13 formed on the piezoelectric film 12; and first upper wiring 16. The upper electrode 13 includes a main electrode portion 13A constituting the piezoelectric element 9 and an extension portion 13B as second upper wiring drawn out of the main electrode portion 13A and connected to the first upper wiring 16. The first upper wiring 16 has a portion arranged between the extension portion 13B and the movable film formation layer 10, and, within this portion, the extension portion 13B is connected to the first upper wiring 16.

Abstract: An inkjet printing head 1 includes a pressure chamber (cavity) 5, a movable film 10A defining a top surface portion of the pressure chamber 5, and a piezoelectric element 9 disposed above the movable film 10A. The piezoelectric element 9 includes a lower electrode 11 formed above the movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. One end portion of an upper wiring 17 is connected to an upper surface of the upper electrode 13. The upper wiring 17 extends from above the upper electrode 13, crosses an outer edge of the pressure chamber 5, and extends outside the pressure chamber 5. The piezoelectric film 12 has an active portion 12A with an upper surface in contact with a lower surface of the upper electrode 13 and an inactive portion 12B extending along a lower surface of the upper wiring 17 from one end portion of the active portion 12A to outside the pressure chamber 5.

Abstract: An inkjet printing head includes a hydrogen barrier film, covering side surfaces of upper electrodes and piezoelectric films, a portion of an upper surface of each upper electrode, and a portion of an upper surface of a lower electrode, an insulating film, formed above the hydrogen barrier film, upper wiring, formed above the insulating film, connects the upper electrode to a drive circuit, and a lower wiring, formed above the insulating film, connects the lower electrode to the drive circuit. First contact holes, each exposing an upper electrode, and second contact holes, each exposing an extension portion, are formed in the hydrogen barrier film and the insulating film. The upper wirings are connected to the upper surfaces of the upper electrodes via the first contact holes and the lower wiring is connected to an upper surface of the extension portion via the second contact holes.

Abstract: An inkjet apparatus capable of achieving a good withstand voltage in a movable part of a piezoelectric element is provided. An inkjet apparatus is provided, wherein the inkjet apparatus comprises: an actuator substrate, partitioning a cavity for accumulating ink; a vibrating film, supported by the actuator substrate and partitioning the cavity; and a piezoelectric element, on the vibrating film, and comprising an upper electrode, a lower electrode, and a piezoelectric film between the upper electrode and the lower electrode; wherein the piezoelectric film extends along a space covering the whole cavity; and the upper electrode is constrained in an inner space of the cavity.

Abstract: An ink jet print head 1 includes: a pressure chamber (cavity) 7; a movable film formation layer 10 arranged on the pressure chamber 7 and including a movable film 10A defining a ceiling surface portion of the pressure chamber 7; a piezoelectric element 9 formed on the movable film 10A and including a lower electrode 11, a piezoelectric film 12 formed on the lower electrode 11, and an upper electrode 13 formed on the piezoelectric film 12; and first upper wiring 16. The upper electrode 13 includes a main electrode portion 13A constituting the piezoelectric element 9 and an extension portion 13B as second upper wiring drawn out of the main electrode portion 13A and connected to the first upper wiring 16. The first upper wiring 16 has a portion arranged between the extension portion 13B and the movable film formation layer 10, and, within this portion, the extension portion 13B is connected to the first upper wiring 16.

Abstract: An inkjet apparatus capable of achieving a good withstand voltage in a movable part of a piezoelectric element is provided. An inkjet apparatus is provided, wherein the inkjet apparatus comprises: an actuator substrate, partitioning a cavity for accumulating ink; a vibrating film, supported by the actuator substrate and partitioning the cavity; and a piezoelectric element, on the vibrating film, and comprising an upper electrode, a lower electrode, and a piezoelectric film between the upper electrode and the lower electrode; wherein the piezoelectric film extends along a space covering the whole cavity; and the upper electrode is constrained in an inner space of the cavity.

Abstract: An inkjet apparatus capable of achieving a good withstand voltage in a movable part of a piezoelectric element is provided. An inkjet apparatus (1) is provided, wherein the inkjet apparatus (1) comprises: an actuator substrate (2), partitioning a cavity (5) for accumulating ink; a vibrating film (6), supported by the actuator substrate (2) and partitioning the cavity (5); and a piezoelectric element (7), on the vibrating film (6), and comprising an upper electrode (20), a lower electrode (18), and a piezoelectric film (19) between the upper electrode (20) and the lower electrode (18); wherein the piezoelectric film (19) extends along a space covering the whole cavity (5); and the upper electrode (20) is constrained in an inner space of the cavity.

Abstract: An inkjet printing head includes a hydrogen barrier film, covering side surfaces of upper electrodes and piezoelectric films, a portion of an upper surface of each upper electrode, and a portion of an upper surface of a lower electrode, an insulating film, formed above the hydrogen barrier film, upper wiring, formed above the insulating film, connects the upper electrode to a drive circuit, and a lower wiring, formed above the insulating film, connects the lower electrode to the drive circuit. First contact holes, each exposing an upper electrode, and second contact holes, each exposing an extension portion, are formed in the hydrogen barrier film and the insulating film. The upper wirings are connected to the upper surfaces of the upper electrodes via the first contact holes and the lower wiring is connected to an upper surface of the extension portion via the second contact holes.

Abstract: An inkjet printing head 1 includes an actuator substrate 2 having pressure chambers (cavities) 7, a movable film formation layer 10 including movable films 10A disposed above the pressure chambers 7 and defining top surface portions of the pressure chambers 7, and piezoelectric elements 9 formed above the movable films 10A. Each piezoelectric element 9 includes a lower electrode 11 formed above a movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. The piezoelectric film 12 includes an active portion 12A with an upper surface in contact with a lower surface of an upper electrode 13 and an inactive portion 12B led out in a direction along a front surface of the movable film formation layer 10 from an entire periphery of a side portion of the active portion 12A and having a thickness thinner than that of the active portion 12A.

Abstract: An inkjet apparatus capable of achieving a good withstand voltage in a movable part of a piezoelectric element is provided. An inkjet apparatus (1) is provided, wherein the inkjet apparatus (1) comprises: an actuator substrate (2), partitioning a cavity (5) for accumulating ink; a vibrating film (6), supported by the actuator substrate (2) and partitioning the cavity (5); and a piezoelectric element (7), on the vibrating film (6), and comprising an upper electrode (20), a lower electrode (18), and a piezoelectric film (19) between the upper electrode (20) and the lower electrode (18); wherein the piezoelectric film (19) extends along a space covering the whole cavity (5); and the upper electrode (20) is constrained in an inner space of the cavity.

Abstract: An inkjet printing head 1 includes a pressure chamber (cavity) 5, a movable film 10A defining a top surface portion of the pressure chamber 5, and a piezoelectric element 9 disposed above the movable film 10A. The piezoelectric element 9 includes a lower electrode 11 formed above the movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. One end portion of an upper wiring 17 is connected to an upper surface of the upper electrode 13. The upper wiring 17 extends from above the upper electrode 13, crosses an outer edge of the pressure chamber 5, and extends outside the pressure chamber 5. The piezoelectric film 12 has an active portion 12A with an upper surface in contact with a lower surface of the upper electrode 13 and an inactive portion 12B extending along a lower surface of the upper wiring 17 from one end portion of the active portion 12A to outside the pressure chamber 5.

Abstract: Provided is a semiconductor memory device wherein nonvolatile memory elements are arranged in a matrix configuration, each of the memory elements having a field effect transistor including a floating gate, an interlayer insulating film and a control gate electrode which are stacked on an insulating film covering a semiconductor substrate, and a source region and a drain region which are respectively formed in the semiconductor substrate on both sides of the gate electrode, the floating gate, interlayer insulating film and control gate electrode being formed in a recess provided in the semiconductor substrate. The semiconductor device of such a structure is reduced in size and highly integrated with its high-performance characteristics maintained.

Abstract: A semiconductor memory device in which source lines for connecting source regions of memory cells disposed in a direction of word lines are composed of conductive films formed on a semiconductor substrate. Gate assemblies including components such as the word lines are formed on the semiconductor substrate. Source regions are formed in self-alignment by using the gate assemblies as masks. Source contact holes are formed above the source regions, and the source lines are in contact with the source regions in the source contact holes. The source lines are composed of conductive films formed on the semiconductor substrate between the adjacent word lines on opposite sides of any of the source regions.

Abstract: Provided is a semiconductor memory device wherein nonvolatile memory elements are arranged in a matrix configuration, each of the memory elements having a field effect transistor including a floating gate, an interlayer insulating film and a control gate electrode which are stacked on an insulating film covering a semiconductor substrate, and a source region and a drain region which are respectively formed in the semiconductor substrate on both sides of the gate electrode, the floating gate, interlayer insulating film and control gate electrode being formed in a recess provided in the semiconductor substrate. The semiconductor device of such a structure is reduced in size and highly integrated with its high-performance characteristics maintained.