Patents by Inventor Kunio Nomoto

Kunio Nomoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing system
    Patent number: 6120348
    Abstract: A polishing method characterized by measuring the thickness of a film of a monitoring piece to be polished which is to be used exclusively for monitoring polishing amount, and obtaining polishing amount on the basis of the results of measurement, and judging, on the basis of the resulting polishing amount, setting/change of polishing condition of a polishing object, whether it is necessary or not to replace a polishing pad, and/or completion of run-in polishing after replacement of the polishing pad, and an apparatus to be used for practicing same.
    Type: Grant
    Filed: June 1, 1999
    Date of Patent: September 19, 2000
    Assignee: Sumitomo Metal Industries Limited
    Inventors: Takashi Fujita, Masafumi Goto, Kunio Nomoto
  • Polishing system
    Patent number: 6110008
    Abstract: A polishing method characterized by measuring the thickness of a film of a monitoring piece to be polished which is to be used exclusively for monitoring polishing amount, and obtaining polishing amount on the basis of the results of measurement, and judging, on the basis of the resulting polishing amount, setting/change of polishing condition of a polishing object, whether it is necessary or not to replace a polishing pad, and/or completion of run-in polishing after replacement of the polishing pad, and an apparatus to be used for practicing same.
    Type: Grant
    Filed: September 26, 1997
    Date of Patent: August 29, 2000
    Assignee: Sumitomo Metal Industries Limited
    Inventors: Takashi Fujita, Masafumi Goto, Kunio Nomoto