Abstract: Provided is a lithography apparatus that performs a patterning on a substrate. The lithography apparatus includes a processor configured to perform processing of assigning, to each of a plurality of substrates sequentially carried in from a first external apparatus, order information indicating an carrying-in order of the plurality of substrates; a plurality of units configured to respectively perform patternings of the plurality of substrates in parallel; and a transmitting device configured to transmit, to a second external apparatus, the order information corresponding to a substrate, of the plurality of substrates, carried out after being patterned thereon by one of the plurality of units.

Abstract: There is provided a lithography apparatus advantageous in a process on a substrate, on which patterning has been performed thereby, that an external apparatus performs (in a succeeding step). The apparatus includes a controller and a transmitter. The controller extracts log information to be transmitted to the external apparatus that performs a process on the substrate, on which the patterning has been performed, among log information associated with the patterning. The transmitter transmits the extracted log information to the external apparatus.

Abstract: The present invention provides a drawing apparatus which performs drawing on a substrate with a charged particle beam based on drawing data generated from pattern data representing a circuit pattern to be drawn on the substrate, and mark data representing a mark to be drawn on the substrate, the apparatus including an obtaining unit configured to obtain information associated with a positioning accuracy of the charged particle beam relative to the substrate, a determination unit configured to determine a drawing region for the mark based on the obtained information, and a generation unit configured to generate the drawing data by combining the pattern data and the mark data such that the mark is drawn in the determined drawing region.

Abstract: A method of aligning an object including steps of detecting an image of a mark on the object with respect to each of a plurality of areas on the object, obtaining a position of the mark based on the detected image with respect to each image detected in the detecting step, extracting a feature of the mark based on the detected image with respect to each image detected in the detecting step, determining a correction value based on previously prepared information to relate the extracted feature to the correction value, with respect to each position obtained in the obtaining step, correcting the obtained position based on the correction value with respect to each position obtained in the obtaining step, and calculating a position of each of a plurality of areas on the object based on positions corrected in the correcting step.

Abstract: A method of aligning an object. The method includes the steps of detecting an image of a mark on the object, obtaining a position of the mark based on the detected image, extracting a feature of the mark based on the detected image, and correcting the detected position based on the extracted feature.

Abstract: A method of aligning an object including steps of detecting an image of a mark on the object with respect to each of a plurality of areas on the object, obtaining a position of the mark based on the detected image with respect to each image detected in the detecting step, extracting a feature of the mark based on the detected image with respect to each image detected in the detecting step, determining a correction value based on previously prepared information to relate the extracted feature to the correction value, with respect to each position obtained in the obtaining step, correcting the obtained position based on the correction value with respect to each position obtained in the obtaining step, and calculating a position of each of a plurality of areas on the object based on positions corrected in the correcting step.

Abstract: An object of this invention is to provide an alignment method which can execute accurate alignment using only one kind of alignment detection apparatus. In order to achieve this object, an alignment method of aligning an object to be aligned by measuring an alignment mark position on the object includes detecting the alignment mark on the object, obtaining the position data of the alignment mark on the basis of the detected mark information, extracting the feature amount of the alignment mark on the basis of the mark information, obtaining the correction value of the position data on the basis of the extracted feature amount of the alignment mark, and aligning the object on the basis of position information corrected using the correction value.

Abstract: A positioning method of detecting a position of an object, fixed on a driving device, in a direction of height as a driving direction, by a surface position detector, while scanning the object in a direction perpendicular to the driving direction of the driving device and positioning and correction driving the object by the driving device to sequentially set the object at a predetermined position and a predetermined height. The method includes a step of monitoring a driving condition of the driving device in synchronism with a periodical detection performed by the surface position detector and a step of correcting a drive amount of the driving device on the basis of the periodical detection performed by the surface position detector and a result of the monitoring performed in the monitoring step.