Abstract: A method includes forming a first sealing layer at a first edge region of a first wafer; and bonding the first wafer to a second wafer to form a wafer stack. At a time after the bonding, the first sealing layer is between the first edge region of the first wafer and a second edge region of the second wafer, with the first edge region and the second edge region comprising bevels. An edge trimming process is then performed on the wafer stack. After the edge trimming process, the second edge region of the second wafer is at least partially removed, and a portion of the first sealing layer is left as a part of the wafer stack. An interconnect structure is formed as a part of the second wafer. The interconnect structure includes redistribution lines electrically connected to integrated circuit devices in the second wafer.

Abstract: The present disclosure provides a thin film including a first thermoplastic polyolefin (TPO) elastomer which is anhydride-grafted. The present disclosure further provides a method for manufacturing the thin film, a laminated material and a method for adhesion.

Abstract: A method of taking a sliding exercise, which is taken on a training machine and the training machine has two pedals, includes the steps of: a) putting feet on the pedals; and b) reciprocating the feet in opposite directions or in the same direction. The feet respectively move in a curved path on a substantial horizontal plane. Therefore, the use's feet reciprocate forward/rearward and split to train user's muscles.

Abstract: A method of taking a sliding exercise, which is taken on a training machine and the training machine has two pedals, includes the steps of: a) putting feet on the pedals; and b) reciprocating the feet in opposite directions or in the same direction. The feet respectively move in a curved path on a substantial horizontal plane. Therefore, the use's feet reciprocate forward/rearward and split to train user's muscles.

Abstract: A platform for securely mounting a wafer cassette holder thereon is provided which includes a wafer cassette holder that has a flat bottom surface and four sidewall panels, a platform that has a flat top surface larger than and for mating to the flat bottom surface of the wafer cassette holder, And a securing device mounted in the flat top surface of the platform juxtaposed to each side of the four sidewalls of the wafer cassette holder for preventing the holder from accidentally slipping off the platform, the securing device may include either a plurality of engagement pins that slidingly engages the wafer cassette holder for securely holding the holder on the platform, or a plurality of side panels mounted along the peripheral edge of the platform for preventing the holder from slipping off the platform.

Abstract: In some aspects, a method is provided for abating perfluorocarbons (PFCs) in a gaseous waste abatement system having a pre-installed controlled decomposition oxidation (CDO) thermal reaction chamber. The method that includes (1) providing a catalyst bed within the CDO thermal reaction chamber; and (2) introducing a gaseous waste stream into the CDO thermal reaction chamber so as to expose the gaseous waste stream to the catalyst bed. Numerous other aspects are provided.

Abstract: In some aspects, a method is provided for abating perfluorocarbons (PFCs) in a gaseous waste abatement system having a pre-installed controlled decomposition oxidation (CDO) thermal reaction chamber. The method that includes (1) providing a catalyst bed within the CDO thermal reaction chamber; and (2) introducing a gaseous waste stream into the CDO thermal reaction chamber so as to expose the gaseous waste stream to the catalyst bed. Numerous other aspects are provided.

Abstract: In at least one aspect, a controlled decomposition oxidation (CDO) system is provided for abating perfluorocarbons (PFCs) that includes (1) an upstream portion including a first conduit adapted to convey a gaseous waste stream; (2) a thermal reaction chamber having an inlet coupled to the first conduit, a catalyst bed adapted to abate PFCs, and an outlet; and (3) a downstream portion including a second conduit having a first end coupled to the outlet of the thermal reaction chamber and having a portion, downstream from the first end, positioned proximate to the first conduit. The second conduit is adapted to convey a gaseous waste stream heated within the thermal reaction chamber to enable a transfer of heat energy from the second conduit to the first conduit so as to pre-heat the gaseous waste stream in the first conduit. Numerous other aspects are provided.

Abstract: In certain aspects, a system is provided for abating perfluorocarbons (PFCs) from a gaseous waste stream that includes (1) a wet scrubber adapted to scrub a gaseous waste stream and having an outlet adapted to discharge a scrubbed gaseous waste stream; and (2) a controlled decomposition oxidation (CDO) system. The CDO system includes a CDO thermal reaction chamber that includes (a) an inlet coupled to the outlet of the wet scrubber; (b) a catalyst bed adapted to abate PFCs within the CDO thermal reaction chamber; and (c) an outlet. Numerous other aspects are provided.

Abstract: In some aspects, an apparatus is provided for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation (CDO) thermal reaction chamber. The apparatus includes (1) a cartridge insertable into the thermal reaction chamber having gas-permeable first and second ends and including a catalyst material; and (2) thermally-conductive fixtures positioned within the cartridge. Numerous other aspects are provided.

Abstract: A new data processing and display method for use in interactive manufacturing process management is achieved. A first variable value, such as WIP, for a manufacturing stage is uploaded from a database and is subtracted from a first target value to obtain a first variable variance. A first variable variance bar is displayed above a stage axis on a graphical display device and is non-filled if the first variable variance is positive and is filled if the first variable variance is negative. A second variable value, such as production moves, is uploaded and is subtracted from a second target value to obtain a second variable variance. A second variable value bar is displayed below the stage axis on the graphical display device and is non-filled. A second variable variance bar is displayed below the second variable value bar on the graphical display device if the second variable variance is positive.

Abstract: Within both a stocker apparatus and a method for operating the stocker apparatus there is employed: (1) a minimum of six input/output ports; (2) an array of storage locations for storing an array of work in process (WIP) product units; and (3) a random access transportation means for transporting a work in process (WIP) product unit at least bidirectionally between the minimum of six input/output ports and a storage location within the array of storage locations. Within the stocker apparatus and the method, the minimum of six input/output ports provides for more efficient operation of the stocker apparatus.

Abstract: A platform for securely mounting a wafer cassette holder thereon is provided which includes a wafer cassette holder that has a flat bottom surface and four sidewall panels, a platform that has a flat top surface larger than and for mating to the flat bottom surface of the wafer cassette holder, and a securing means mounted in the flat top surface of the platform juxtaposed to each side of the four sidewalls of the wafer cassette holder for preventing the holder from accidentally slipping off the platform. The securing means may include either a plurality of engagement pins that slidingly engages the wafer cassette holder for securely holding the holder on the platform, or a plurality of side panels mounted along the peripheral edge of the platform for preventing the holder from slipping off the platform.

Abstract: A method and system for production line target generation based on unlimited capacity allocation utilizing an algorithm that begins with setting the required delivery date (REQ_DATE) from the customer's purchase order and using the REQ_DATE to define other related requirements by backtracking the production line requirements to determine how many stages need to be passed before delivery, and to decide where and how to setup and arrange the production equipment, in order to complete and deliver the ordered goods on time.

Abstract: Within both a stocker apparatus and a method for operating the stocker apparatus there is employed, in addition to: (1) a minimum of one input/output port; (2) an array of storage locations for storing an array of work in process (WIP) product units; and (3) a random access transportation means for transporting a work in process (WIP) product unit at least bidirectionally between the minimum of one input/output port and a storage location within the array of storage locations; (4) a controller for controlling the random access transportation means. Within the stocker apparatus and the method, the controller is programmed such that upon unavailability of the minimum of one input/output port and upon concurrent receipt of a request to retrieve a work in process (WIP) product unit stored within the array of storage locations to reposition the requested work in process (WIP) product unit to a designated storage location within the array of storage locations where it may be manually retrieved.

Abstract: A method and an apparatus for preventing the misplacement of a cassette pod on the loadport of a process machine are described. In the method, a cassette pod that is equipped with an identification tag on a front panel is first provided, a process machine that is equipped with a loadport for receiving the cassette pod is then provided, at least one position verification block is mounted on the loadport at a first preset position, and then at least one position verification finger is mounted on the front panel of the cassette pod corresponding to the first preset position of the at least one position verification block such that when the cassette pod is placed on the loadport, the at least one position verification finger does not interfere with the at least one position verification block.

Abstract: A plural motor assembly includes a first motor generating a parameter, a control circuit electrically connected to the first motor for detecting the parameter and outputting a switch signal while the parameter is abnormal, and a second motor electrically connected to the control circuit and operating in response to the switch signal. Thus, when one motor is damaged, the speed of rotation of the other motor is increased to maintain normal operation.

Abstract: A method/system for performing dynamic re-scheduling of priorities of work-in-process in a fabrication plant for manufacturing of a product is provided. It reads a key stage report for the work-in-process and a master production schedule for the work-in-process from stored data. It generates a master production schedule report from the key stage report and the master production schedule following only Due_Date data for the work-in-process, and generates a work-in-process distribution matrix for integrating the master production schedule report with work-in-process quantity data within a deliverable cycle time; allocates selected lots from the work-in-process distribution matrix using a snake pattern method to allocate the selected lots from the matrix, and changes the due date for the selected lots of the work-in-process selected by the snake pattern method. It generates a final re-scheduling table for the work-in-process including the selected lots.

Abstract: Within both a stocker apparatus and a method for operating the stocker apparatus there is employed: (1) a minimum of six input/output ports; (2) an array of storage locations for storing an array of work in process (WIP) product units; and (3) a random access transportation means for transporting a work in process (WIP) product unit at least bidirectionally between the minimum of six input/output ports and a storage location within the array of storage locations. Within the stocker apparatus and the method, the minimum of six input/output ports provides for more efficient operation of the stocker apparatus.

Abstract: Within both a stocker apparatus and a method for operating the stocker apparatus there is employed, in addition to: (1) a minimum of one input/output port; (2) an array of storage locations for storing an array of work in process (WIP) product units; and (3) a random access transportation means for transporting a work in process (WIP) product unit at least bidirectionally between the minimum of one input/output port and a storage location within the array of storage locations; (4) a controller for controlling the random access transportation means. Within the stocker apparatus and the method, the controller is programmed such that upon unavailability of the minimum of one input/output port and upon concurrent receipt of a request to retrieve a work in process (WIP) product unit stored within the array of storage locations to reposition the requested work in process (WIP) product unit to a designated storage location within the array of storage locations where it may be manually retrieved.