Abstract: In one example, a semiconductor device includes a first conductive feature embedded in a first dielectric layer such that a top surface of the first dielectric layer is higher than a top surface of first conductive feature, a contact etch stop layer (CESL) disposed on the first dielectric layer, and a second conductive feature embedded in a second dielectric layer. The second dielectric layer is disposed on the CESL and the second conductive feature extends through the CESL and is in direct contact with the first conductive feature.

Abstract: An imaging lens assembly includes a first optical element and a low-reflection layer. The first optical element has a central opening, and includes a first surface, a second surface and a first outer diameter surface. The first outer diameter surface is connected to the first surface and the second surface. The low-reflection layer is located on at least one of the first surface and the second surface, and includes a carbon black layer, a nano-microstructure and a coating layer. The nano-microstructure is directly contacted with and connected to the carbon black layer, and the nano-microstructure is farther from the first optical element than the carbon black layer from the first optical element. The coating layer is directly contacted with and connected to the nano-microstructure, and the coating layer is farther from the first optical element than the nano-microstructure from the first optical element.

Abstract: An imaging lens assembly includes a first optical element and a low-reflection layer. The first optical element has a central opening, and includes a first surface, a second surface and a first outer diameter surface. The first outer diameter surface is connected to the first surface and the second surface. The low-reflection layer is located on at least one of the first surface and the second surface, and includes a carbon black layer, a nano-microstructure and a coating layer. The nano-microstructure is directly contacted with and connected to the carbon black layer, and the nano-microstructure is farther from the first optical element than the carbon black layer from the first optical element. The coating layer is directly contacted with and connected to the nano-microstructure, and the coating layer is farther from the first optical element than the nano-microstructure from the first optical element.

Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first insulating layer and first and second gate spacers in first and second openings of the first insulating layer, respectively, forming a first conductive gate stack adjacent to the first gate spacer and forming an insulating material adjacent to the second gate spacer after forming the first conductive gate stack. The method also includes covering the first conductive gate stack and the insulating material with a first insulating capping layer and a second insulating capping layer, respectively, and forming a source/drain contact structure between the first and second gate spacer layers. The top surface of the first insulating layer is higher than those of the insulating material and is substantially level with that of the first conductive gate stack.

Abstract: A semiconductor device includes a source via having a body portion and a barrier layer surrounding the body portion, and the body portion is in physical contact with the source contact. Furthermore, the barrier layer includes at least one sidewall section separating the source via from an adjacent via structure. As such, the via to via leakage may be prevented. Overall, by providing a semiconductor device having the above structures, the contact resistance is reduced, and the device performance is further improved.

Abstract: A semiconductor device includes a source region and a drain region, a first source contact, a first drain contact, a first drain via and a first source via. The source region and the drain region are located over a substrate. The first source contact is disposed on the source region, and the first drain contact is disposed on the drain region. The first drain via is connected to the first drain contact, wherein the first drain via includes a barrier-less body portion. The first source via is connected to the first source contact, wherein the first source via includes a body portion and a barrier layer surrounding the body portion, and a size of the first source via is greater than a size of the first drain via.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a gate structure formed over a fin structure. The semiconductor device structure includes an S/D structure formed over the fin structure and adjacent to the gate structure, and a first dielectric layer formed over the gate structure and the S/D structure. The semiconductor device structure includes an S/D contact structure formed in the first dielectric layer, and a second dielectric layer formed over the S/D contact structure. The semiconductor device structure includes a first conductive via formed in the second dielectric layer, and the first conductive via is directly over the S/D contact structure or directly over the gate structure. The first conductive via has a protruding portion that is lower than the top surface of the S/D contact structure or lower than the top surface of the gate structure.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a conductive gate stack formed over a substrate. A first gate spacer is formed adjacent to a sidewall of the conductive gate stack. A source/drain contact structure is formed adjacent to the first gate spacer. An insulating capping layer covers and is in direct contact with an upper surface of the conductive gate stack. A top width of the insulating capping layer is substantially equal to a top width of the conductive gate stack. The insulating capping layer is separated from the source/drain contact structure by the first gate spacer.

Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a substrate; a gate structure disposed over the substrate and over a channel region of the semiconductor device, wherein the gate structure includes a gate stack and spacers disposed along sidewalls of the gate stack, the gate stack including a gate dielectric layer and a gate electrode; a first metal layer disposed over the gate stack, wherein the first metal layer laterally contacts the spacers over the gate dielectric layer and the gate electrode; and a gate via disposed over the first metal layer.

Abstract: A semiconductor device includes a gate disposed over a substrate. A source/drain is disposed in the substrate. A conductive contact is disposed over the source/drain. An air spacer is disposed between the gate and the conductive contact. A first component is disposed over the gate. A second component is disposed over the air spacer. The second component is different from the first component.

Abstract: A semiconductor device includes a gate disposed over a substrate. A source/drain is disposed in the substrate. A conductive contact is disposed over the source/drain. An air spacer is disposed between the gate and the conductive contact. A first component is disposed over the gate. A second component is disposed over the air spacer. The second component is different from the first component.

Abstract: A method and device according to the present disclosure includes a substrate that has a first transistor terminal such as a source feature and a second transistor terminal such as another source feature. Contact structures are formed on each source/drain feature. After forming the contact structures, a via opening is formed in dielectric materials above the contact structures, which is filled to form a non-linear via that extends from the contact on the first source feature to the contact on the second source feature. The non-linear via may include an outline in a top view of an undulating-shape having convex and/or concave portions.

Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a substrate; a gate structure disposed over the substrate and over a channel region of the semiconductor device, wherein the gate structure includes a gate stack and spacers disposed along sidewalls of the gate stack, the gate stack including a gate dielectric layer and a gate electrode; a first metal layer disposed over the gate stack, wherein the first metal layer laterally contacts the spacers over the gate dielectric layer and the gate electrode; and a gate via disposed over the first metal layer.

Abstract: One or more active region structures each protrude vertically out of a substrate in a vertical direction and each extend horizontally in a first horizontal direction. A source/drain component is disposed over the one or more active region structures in the vertical direction. A source/drain contact is disposed over the source/drain component in the vertical direction. The source/drain contact includes a bottom portion and a top portion. A protective liner is disposed on side surfaces of the top portion of the source/drain contact but not on side surfaces of the bottom portion of the source/drain contact.

Abstract: A semiconductor device includes a source feature and a drain feature disposed over a substrate. The semiconductor device includes a source via electrically coupled to the source feature and a drain via electrically coupled to the drain feature. The semiconductor device includes a source via metal line disposed over and directly connected to the source via. The semiconductor device includes and a drain via metal line disposed over and directly connected to the drain via. The source via metal line has two first outer edges extending lengthwise along a first direction and at least one of the first outer edges is substantially aligned with an edge of the source via from a top view. The drain via metal line has two second outer edges extending lengthwise along the first direction and the two second outer edges are offset from edges of the drain via from a top view.

Abstract: One or more active region structures each protrude vertically out of a substrate in a vertical direction and each extend horizontally in a first horizontal direction. A source/drain component is disposed over the one or more active region structures in the vertical direction. A source/drain contact is disposed over the source/drain component in the vertical direction. The source/drain contact includes a bottom portion and a top portion. A protective liner is disposed on side surfaces of the top portion of the source/drain contact but not on side surfaces of the bottom portion of the source/drain contact.

Abstract: In one example, a semiconductor device includes a first conductive feature embedded in a first dielectric layer such that a top surface of the first dielectric layer is higher than a top surface of first conductive feature, a contact etch stop layer (CESL) disposed on the first dielectric layer, and a second conductive feature embedded in a second dielectric layer. The second dielectric layer is disposed on the CESL and the second conductive feature extends through the CESL and is in direct contact with the first conductive feature.

Abstract: An exemplary semiconductor device includes a substrate, a first conductive feature, a second conductive feature, and a third conductive feature over the substrate. The first conductive feature has a first top surface and a side surface. The third conductive feature is on the first top surface of the first conductive feature and is spaced away from the second conductive feature. The third conductive feature has a first sidewall and a second sidewall opposing the first sidewall. The first sidewall extends between the first conductive feature and the second conductive feature. At least a segment of the first sidewall has a first slope. The second sidewall has a second slope. The second slope is greater than the first slope.

Abstract: An exemplary semiconductor device includes a source feature and a drain feature disposed over a substrate. The semiconductor device further includes a source via electrically coupled to the source feature, and a drain via electrically coupled to the drain feature. The source via has a first size; the drain via has a second size; and the first size is greater than the second size. The semiconductor device may further include a first metal line electrically coupled to the source via and a second metal line electrically coupled to the drain via. The source via has a first dimension matching a dimension of the first metal line, and the drain via has a second dimension matching a dimension of the second metal line. The first metal line may be wider than the second metal line.

Abstract: In one example, a method includes performing a first etching process to pattern a dielectric layer and expose a contact etch stop layer, performing a second etching process to remove the etch stop layer and expose a top surface of an underlying feature, performing a third etching process to laterally recess the etch stop layer, and depositing a conductive material over the underlying feature to create a conductive feature in direct contact with the underlying feature.