Abstract: A wafer handler cleaning tool may include a scraping device positioned near semiconductor equipment (e.g., a cooling plate, a semiconductor processing device, and/or the like) such that the scraping device removes foreign objects, debris, and/or other types of matter from the underside of the wafer handler when the wafer handler loads a wafer into the semiconductor equipment and/or unloads the wafer from the semiconductor equipment. Moreover, the wafer handler cleaning tool may include a negative pressure device to draw the removed foreign objects, debris, and/or other types of matter away from the scraping device and toward a filtration device such that the filtration device captures the removed foreign objects, debris, and/or other types of matter.

Abstract: A wafer handler cleaning tool may include a scraping device positioned near semiconductor equipment (e.g., a cooling plate, a semiconductor processing device, and/or the like) such that the scraping device removes foreign objects, debris, and/or other types of matter from the underside of the wafer handler when the wafer handler loads a wafer into the semiconductor equipment and/or unloads the wafer from the semiconductor equipment. Moreover, the wafer handler cleaning tool may include a negative pressure device to draw the removed foreign objects, debris, and/or other types of matter away from the scraping device and toward a filtration device such that the filtration device captures the removed foreign objects, debris, and/or other types of matter.

Abstract: A button assembly includes a button, an indicating lamp, a rheostat and a switch. The button includes a transparent pressing portion. The indicating lamp is positioned in the pressing portion. The rheostat includes a base and an adjuster rotatably attached to the base. The adjuster is rotated by rotation of the button. The switch is capable of being triggered by downwardly movement of the button.

Abstract: A transport system. The transport system comprises a first interbay component, a second interbay component, a plurality of intrabay components, and a route controller. The first and second interbay components transport the vehicles between the tool bays. Each of the intrabay components, linked with the second interbay component, transports the vehicles within one of the tool bays. Additionally, the intrabay component does not link with the first interbay component directly. The route controller estimates a transport cost for transporting the vehicle via the second interbay device, and determines whether the vehicle is to be transported via the first or second interbay component according to the estimated transport cost.

Abstract: A detecting system includes a slot, a controller and a power source terminal. The slot includes a first detecting pin and a second detecting pin. The first detecting pin is electrically connected to a detecting voltage terminal. The second detecting pin is connected to ground. The controller is electrically connected to the first detecting pin. The controller receives a high level voltage signal from the first detecting pin when an expansion card is not detected. The power source terminal is connected to the slot under control of the controller. On the condition that the first detecting pin is electrically connected to the second detecting pin. The controller receives a low level voltage signal from the first detecting pin. The controller is then triggered to connect the power source terminal to the slot to supply power to the expansion card.

Abstract: A button assembly includes a button, an indicating lamp, a rheostat and a switch. The button includes a transparent pressing portion. The indicating lamp is positioned in the pressing portion. The rheostat includes a base and an adjuster rotatably attached to the base. The adjuster is rotated by rotation of the button. The switch is capable of being triggered by downwardly movement of the button.

Abstract: System and method for carrier transportation management in a wafer fabrication facility (“fab”) are described.

Abstract: System and method for carrier transportation management in a wafer fabrication facility (“fab”) are described.

Abstract: A transport system. The transport system comprises a first interbay component, a second interbay component, a plurality of intrabay components, and a route controller. The first and second interbay components transport the vehicles between the tool bays. Each of the intrabay components, linked with the second interbay component, transports the vehicles within one of the tool bays. Additionally, the intrabay component does not link with the first interbay component directly. The route controller estimates a transport cost for transporting the vehicle via the second interbay device, and determines whether the vehicle is to be transported via the first or second interbay component according to the estimated transport cost.

Abstract: The present invention relates to an apparatus and method for processing the flow of semiconductor wafers through a furnace tool having a front-opening unified pod (FOUP) material handling system. The invention provides for an automated control flow to realize greater efficiency and assure process quality. In one aspect of the invention the wafer batch completing its operation is discharged simultaneous with the charging of the next batch. Essentially the operation takes place by overlapping processing operations. An embodiment of the invention includes a process comprising the steps of: providing a first batch of semiconductor material, and loading the first batch into a carrier which transports the first batch into a semiconductor manufacturing process, and while the first batch undergoes the process, forming a second batch of semiconductor material, and pausing a second batch process operation until the first batch completes processing, to reduce the idle time of said process.

Abstract: A roller skate shoe includes a shoe body and a roller mechanism. The roller mechanism is consisted of a housing, a roller, a roller axis, press rods, elastic members and a butting assembly. An accommodating chamber is disposed below a rear end of an insole of a shoe body, and the rear end of the insole is disposed with an insertion opening penetrating a rear end of the accommodating chamber, thereby placing the roller mechanism in the accommodating chamber. To put the aforesaid structure in use, the roller is extended or retracted through actions of the butting assembly and the elastic members of the roller mechanism, thereby providing a user with choices of using the roller skate shoe for skating or walking.

Abstract: A roller skate shoe includes a shoe body and a roller mechanism. The roller mechanism is consisted of a housing, a roller, a roller axis, press rods, elastic members and a butting assembly. An accommodating chamber is disposed below a rear end of an insole of a shoe body, and the rear end of the insole is disposed with an insertion opening penetrating a rear end of the accommodating chamber, thereby placing the roller mechanism in the accommodating chamber. To put the aforesaid structure in use, the roller is extended or retracted through actions of the butting assembly and the elastic members of the roller mechanism, thereby providing a user with choices of using the roller skate shoe for skating or walking.

Abstract: Ready assembled/disassembled support board structure for drawers, including a cabinet body and two support boards. The cabinet body is a rectangular body formed by five rectangular wall boards defining an interior space and a front opening. Several drawers are vertically arranged in the cabinet body. The support boards are respectively disposed on the inner faces of the side walls of the cabinet body. Several cabinet body slide rails are disposed on the support board to be assembled with the drawer slide rails of the drawers. A first stop section is disposed on a predetermined portion of the cabinet body. The support board includes a second stop section and a resilient section. The second stop section is disposed on the support board corresponding to the first stop section for abutting against the first stop section. The resilient section is disposed on the support board opposite to the second stop section for abutting against a predetermined portion of the cabinet body.