Patents by Inventor Kuo T. Chang

Kuo T. Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Memory cell structure having nitride layer with reduced charge loss and method for fabricating same
    Patent number: 6992370
    Abstract: According to one embodiment, a memory cell structure comprises a semiconductor substrate, a first silicon oxide layer situated over the semiconductor substrate, a charge storing layer situated over the first silicon oxide layer, a second silicon oxide layer situated over the charge storing layer, and a gate layer situated over the second silicon oxide layer. In the exemplary embodiment, the charge storing layer comprises silicon nitride having reduced hydrogen content, e.g., in the range of about 0 to 0.5 atomic percent. As a result, the reduced hydrogen content reduces the charge loss in the charge storing layer. The reduced charge loss in the charge storing layer has the benefit of reducing threshold voltage shifts, programming data loss, and programming capability loss in the memory device, thereby improving memory device performance.
    Type: Grant
    Filed: September 4, 2003
    Date of Patent: January 31, 2006
    Assignee: Advanced Micro Devices, Inc.
    Inventors: George J. Kluth, Robert B. Clark-Phelps, Joong S. Jeon, Huicai Zhong, Arvind Halliyal, Mark T. Ramsbey, Robert B. Ogle, Jr., Kuo T. Chang, Wenmei Li