Patents by Inventor Kuo-Tang Hsu

Kuo-Tang Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Novel design to eliminate wafer sticking
    Publication number: 20050061775
    Abstract: A new wet processing apparatus is achieved. The apparatus comprises a tank to contain a fluid. A drain opening is included in the tank. A regulating means is disposed in the tank and over the drain opening to control the draining rate and the draining direction of the fluid.
    Type: Application
    Filed: September 19, 2003
    Publication date: March 24, 2005
    Inventors: Kuo-Tang Hsu, Yi-Ping Pan, Jen-Yuan Yang, Jih-Pao Chang, Tai-Yung Yu