Patents by Inventor Kuo-Wei Chih

Kuo-Wei Chih has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR CLEANING SEMICONDUCTOR DEVICE
    Publication number: 20180366316
    Abstract: A method is provided for cleaning a semiconductor structure. The method includes performing a rinse process of CO2 with water (CO2W) process over the semiconductor structure; and performing a standard clean (SC) process over the semiconductor structure with an overlapping period with the step of performing the rinse process of CO2W.
    Type: Application
    Filed: June 14, 2017
    Publication date: December 20, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Chun-Jung Wang, Chia-Ming Lee, Tsung-Hsun Tsai, Kuo-Wei Chih, Chia-Yen Hsu
  • SUBSTRATE CLEANING METHOD
    Publication number: 20170207079
    Abstract: A substrate cleaning method is provided. A substrate is provided, followed by performing a first pre-cleaning process with a first rotation speed and a first duration time. After the first pre-cleaning process, a second pre-cleaning process is performed with a second rotation speed and a second duration time, wherein the second rotation speed is greater than the first rotation speed. After the second pre-cleaning process, a cleaning process is performed by using a chemical agent with a cleaning rotation speed.
    Type: Application
    Filed: January 15, 2016
    Publication date: July 20, 2017
    Inventors: Chia-Ming Lee, Kuo-Wei Chih, Chen-Hsu Hung, Chun-Li Lin, Chia-Yen Hsu, Tsung-Hsun Tsai, Po-Lun Cheng