Abstract: A noncontact fluid bearing is manufactured by disposing a flow controller in a cavity of a carrier to form a pressure chamber within the cavity. A sealing layer of the flow controller is located between a porous layer of the flow controller and the pressure chamber and has micro through holes communicating with the pressure chamber and pores of the porous layer. Because the sealing layer is located in the pressure chamber and a surface of the porous layer is exposed by a housing of the carrier, the noncontact fluid bearing can be processed from the exposed surface of the porous layer to conform standards of thickness and flatness. Furthermore, the sealing layer peeling from the noncontact fluid bearing is prevented.

Abstract: A non-contact bearing is provided. In a suspended state, the non-contact bearing is disposed with a predetermined spacing to a first guide surface. The non-contact bearing includes: a bearing body and a micro electro mechanical layer. The bearing body includes a second guide surface, wherein the second guide surface is opposite to the first guide surface. The micro electro mechanical layer is disposed on the second guide surface, and includes at least one micro sensor and/or at least one micro actuator.

Abstract: An aerostatic bearing includes a base having a foundation layer and a plurality of ventilation bodies protruding from the foundation layer, the ventilation bodies being made of a porous material; and a sealing layer covering the base and revealing at least one of the ventilation bodies.

Abstract: A non-contact bearing is provided. In a suspended state, the non-contact bearing is disposed with a predetermined spacing to a first guide surface. The non-contact bearing includes: a bearing body and a micro electro mechanical layer. The bearing body includes a second guide surface, wherein the second guide surface is opposite to the first guide surface. The micro electro mechanical layer is disposed on the second guide surface, and includes at least one micro sensor and/or at least one micro actuator.

Abstract: A measurement device for a linear stage includes a two-dimensional grating and a measurement unit respectively disposed on first and second moving stages of the linear stage. The measurement unit includes a light source, a two-dimensional sensor and a processor. The light source emits incident light to the two-dimensional grating so that the incident light is reflected thereby to result in reflection light. The two-dimensional sensor receives the reflection light and converts the same to a reflection signal. The processor receives the reflection signal and determines accordingly a first rotational angle, and first and second displacement components of a displacement of the first moving stage.

Abstract: An aerostatic bearing includes a base having a foundation layer and a plurality of ventilation bodies protruding from the foundation layer, the ventilation bodies being made of a porous material; and a sealing layer covering the base and revealing at least one of the ventilation bodies.

Abstract: A porous aerostatic carrier includes a porous body made by additive manufacturing method and a sealing layer, the porous body comprises a first ventilating portion and a second ventilating portion, and a first porosity of the first ventilating portion is higher than a second porosity of the second ventilating portion. Because of additive manufacturing method, pore size and porosity of the first ventilating portion and the second ventilating portion are controllable to make flow pressure passing through the porous aerostatic carrier distributing evenly.

Abstract: An aerostatic bearing includes a base having a foundation layer and a plurality of ventilation bodies protruding from the foundation layer, the ventilation bodies being made of a porous material; and a sealing layer covering the base and revealing at least one of the ventilation bodies.

Abstract: An aerostatic bearing includes a base having a foundation layer and a plurality of ventilation bodies protruding from the foundation layer, the ventilation bodies being made of a porous material; and a sealing layer covering the base and revealing at least one of the ventilation bodies.

Abstract: An aerostatic bearing includes a base having a foundation layer and a plurality of ventilation bodies protruding from the foundation layer, the ventilation bodies being made of a porous material; and a sealing layer covering the base and revealing at least one of the ventilation bodies.

Abstract: An aerostatic bearing includes a base having a foundation layer and a plurality of ventilation bodies protruding from the foundation layer, the ventilation bodies being made of a porous material; and a sealing layer covering the base and revealing at least one of the ventilation bodies.

Abstract: A hydrostatic bearing adapted to be mated with a base includes a floating seat and a holder. The floating seat is made from a porous material and formed with a bearing surface that has a contour conforming to that of the base. The holder is coupled to the floating seat and cooperates with the floating seat to define an accommodating space for accommodating pressurized air. A pressurized air film is formed between the base and the bearing surface of the floating seat when the pressurized air discharges from the accommodating space through the floating seat so as to separate the floating seat from the base and so as to support the base.

Abstract: A method for manufacturing a porous device with restrictive layer comprises the steps of providing a porous structure having a micro pore structure, flattening the porous carrier to form a surface, and forming a restrictive layer on the surface of the porous carrier, a method for manufacturing said restrictive layer includes forming a nickel-chromium alloy layer on the surface of the porous carrier, forming a copper metal layer on the nickel-chromium alloy layer, forming a nickel metal layer having a top surface on the copper metal layer, and processing said nickel-chromium alloy layer, said copper metal layer and said nickel metal layer to form a plurality of channels communicating with the micro pore structure and the top surface. The restrictive effect and damping effect can raise anti-vibration ability of the porous device itself by formation of dual restrictive structure composed of the micro pore structure and the channels.

Abstract: A method for manufacturing a porous device with restrictive layer comprises the steps of providing a porous structure having a micro pore structure, flattening the porous carrier to form a surface, and forming a restrictive layer on the surface of the porous carrier, a method for manufacturing said restrictive layer includes forming a nickel-chromium alloy layer on the surface of the porous carrier, forming a copper metal layer on the nickel-chromium alloy layer, forming a nickel metal layer having a top surface on the copper metal layer, and processing said nickel-chromium alloy layer, said copper metal layer and said nickel metal layer to form a plurality of channels communicating with the micro pore structure and the top surface. The restrictive effect and damping effect can raise anti-vibration ability of the porous device itself by formation of dual restrictive structure composed of the micro pore structure and the channels.

Abstract: A wet grinding and dispersion apparatus includes a grinding chamber, a shaft, and a grinding wheel unit. The shaft is disposed rotatably in the grinding chamber. The grinding wheel unit is disposed in the grinding chamber, is mounted to rotate with the shaft, and includes a plurality of grinding wheels, each of which has opposite wheel surfaces. Each of the wheel surfaces is formed with stirring protrusions.