Patents by Inventor Kuong-Wen Liu

Kuong-Wen Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030212981
    Abstract: The present invention provides a method utilizing dummy patterns to fabricate active region for stabilizing lithographic process. An original pattern layer of active region is first provided, and an attached diffusion layer of dummy patterns is then matched. Logic operations are used to combine the original pattern layer of active region and the attached diffusion layer of dummy patterns together to fill the attached diffusion layer of dummy patterns in more spacious region of the original pattern layer of active region for increasing the pattern density of active region for mask fabrication, hence acquiring a photo mask meeting the requirement of logic device product and applying to logic devices having different pattern densities of active region. Difference of density between products can thus be reduced. The present invention utilizes dummy patterns to simplify and stabilize lithographic process. Simultaneously, lens heating effect can also be reduced.
    Type: Application
    Filed: May 9, 2002
    Publication date: November 13, 2003
    Inventors: Chong-Jen Huang, Hsin-Huei Chen, Kuong-Wen Liu, Chih-Hao Wang, Jia-Rong Chiou