Abstract: A detector to measure EUV intensity employs a linear array of photodiodes. The detector is particularly suited for photolithography systems that includes: (i) a ringfield camera; (ii) a source of radiation; (iii) a condenser for processing radiation from the source of radiation to produce a ringfield illumination field for illuminating a mask; (iv) a reticle that is positioned at the ringfield camera's object plane and from which a reticle image in the form of an intensity profile is reflected into the entrance pupil of the ringfield camera, wherein the reticle moves in a direction that is transverse to the length of the ringfield illumination field that illuminates the reticle; (v) detector for measuring the entire intensity along the length of the ringfield illumination field that is projected onto the reticle; and (vi) a wafer onto which the reticle imaged is projected from the ringfield camera.

Abstract: In a resistance paste for the production of electric resistors consisting of a polymer binding there are dispersed electrically conductive particles, solvents and additives; in order to produce resistance layers which are electrically stable and resistant to organic substances such as fuels and oils within a temperature range of from -55.degree. C. to +160.degree. C., more than half of the solids contained in the polymer binder consists of a mixture ofa) fully etherified melamine resin,b) polyester resin containing hydroxyl groups andc) an acidic catalyst.

Abstract: Macrocyclic polyaminotriazines containing tetramethylpiperidine side groups are suitable for use as stabilisers, in particular against degradation by UV light, for polyphenylene ethers. They have the advantage that they do not impair, or impair only to an insignificant degree, the dimensional stability under heat of these polymers.

Abstract: A stackable, tray-type packaging unit for semiconductor discs, having a lr portion accommodating the discs and a matching lid, comprising two upright, elongated side walls in the lower portion and two narrow end walls, all walls as well as the lid consisting of deep-drawn plastic material inert to the disc material. A plurality of ribs are formed opposite to each other on the side walls, serving as guide means for the discs during the loading of the unit, stabilizing ribs for accommodating the discs are provided in the base of the lower portion on the joining line between opposite guide ribs. The lower part of the side walls are curved inwardly at an angle of 30.degree. to 60.degree. with respect to the perpendicular upper part.