Abstract: Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.

Abstract: A probe head for a coordinate measuring machine has a feeler device that can be deflected in space. Also provided are balancing element for adjusting a predetermined rest position of the feeler device for any different alignment of the probe head in space. The balancing element are designed as masses. The forces or moments required for balancing the feeler device are produced by the masses.

Abstract: A probe head for a coordinate measuring machine has a stylus resiliently suspended in a housing. A sensor arrangement serves for detecting deflections of the stylus relative to the housing. The sensor arrangement comprises at least one Hall sensor having a magnet and a Hall element arranged in a vicinity to each other. When the stylus is deflected, the magnet is laterally passed by the Hall element in a direction defined from the North Pole to the South Pole of the magnet or vice versa. A Hall voltage of changing polarity can be tapped at the Hall element then. A preferably linear range around the polarity change is processed in order to determine the deflection of the stylus.

Abstract: The invention is directed to a probe for coordinate measuring apparatus. The apparatus includes measuring systems (15, 16, 17) for measuring the deviation of the flexible part (10) of the probe and a damping device damps the flexible part (10) of the probe. The damping device is embodied as at least one friction brake (19, 27) and the friction force of the friction brake is adjustable. The flexible part (10) of the probe can also be blocked by the friction brake (19, 27).

Abstract: A probe head for a coordinate measuring machine has a feeler device that can be deflected in space. Also provided are balancing element for adjusting a predetermined rest position of the feeler device for any different alignment of the probe head in space. The balancing element are designed as masses. The forces or moments required for balancing the feeler device are produced by the masses.

Abstract: A touch probe 9 for a coordinate measuring apparatus is proposed which includes a touch probe chassis 29 adapted to be attached to the coordinate measuring apparatus, a support for the sensing stylus 39 which is mounted on the touch probe chassis 29 so as to be deflectable from a rest position and on which a sensing stylus 47 is mountable for contacting a workpiece 17, a deflection measuring system 55, 57 for detecting a deflection of the support for the sensing stylus 39 with respect to the touch probe chassis 29 and an inspection optics 61 for inspecting a tip 49 of the sensing stylus 47. The touch probe 1 is characterized in that at least one of the components support for the sensing stylus 39 and touch probe chassis 29 comprises a transverse support 39 which extends transversely to a direction of extension of the sensing stylus 47 and which is transparent to light in at least a portion thereof and which is disposed in a beam path 69 of the inspection optics 61.

Abstract: The invention is directed to a probe for coordinate measuring apparatus. The apparatus includes measuring systems (15, 16, 17) for measuring the deviation of the flexible part (10) of the probe and a damping device damps the flexible part (10) of the probe. The damping device is embodied as at least one friction brake (19, 27) and the friction force of the friction brake is adjustable. The flexible part (10) of the probe can also be blocked by the friction brake (19, 27).

Abstract: A touch probe 9 for a coordinate measuring apparatus is proposed which includes a touch probe chassis 29 adapted to be attached to the coordinate measuring apparatus, a support for the sensing stylus 39 which is mounted on the touch probe chassis 29 so as to be deflectable from a rest position and on which a sensing stylus 47 is mountable for contacting a workpiece 17, a deflection measuring system 55, 57 for detecting a deflection of the support for the sensing stylus 39 with respect to the touch probe chassis 29 and an inspection optics 61 for inspecting a tip 49 of the sensing stylus 47. The touch probe 1 is characterized in that at least one of the components support for the sensing stylus 39 and touch probe chassis 29 comprises a transverse support 39 which extends transversely to a direction of extension of the sensing stylus 47 and which is transparent to light in at least a portion thereof and which is disposed in a beam path 69 of the inspection optics 61.

Abstract: The invention is directed to a collision protective arrangement for a measuring arm of a coordinate measuring apparatus for measuring a workpiece. The measuring arm has a surface facing toward the workpiece. The collision protective arrangement includes a part for covering and protecting the surface; and, a circuit switchable between a first electrical state wherein no contact is present between the part and the workpiece and a second electrical state indicative of a collision between the workpiece and the part. The surface of the measuring arm and the part conjointly define an interface and the circuit includes a plurality of resiliently-biased contact pins and contacts mounted at the interface to coact to switch the circuit into the second electrical state when the collision takes place.

Abstract: The invention is directed to a coordinate measuring apparatus wherein the influences of temperature on the measuring uncertainty of the apparatus are eliminated. Components of the two pivot arms, which determine the spacing A of the rotational axes (6, 8) and the spacing of the rotational axis 8 to the probe axis 10, are made of materials having positive and negative thermal expansion coefficients.

Abstract: The invention is directed to a probe head of a coordinate measuring apparatus for conducting measurements on a workpiece. The probe head has a first longitudinal axis and has a probe pin mounted on the probe head. The probe pin has a second longitudinal axis defining an angle with the first longitudinal axis. A joint-free, rigidly-configured adjusting device adjusts this angle when the probe pin is not in contact with the workpiece.

Abstract: The invention is directed to a method for manually measuring a workpiece with a manually guided coordinate measuring apparatus. The apparatus includes a carrier for a probe which, in turn, carries a probe ball 12 on a deflectable probe pin 11. The carrier is movably journalled in several spatial directions. The probe ball 12 is brought into contact with the geometric element of the workpiece 30' to be measured and is guided therealong in continuous contact therewith. Signals (.phi., .psi., z) of coordinate measuring devices are generated with the movement of the probe. Signals (u, v, w) of a transducer of the probe are generated with a deflection of the probe pin 11. Control signals (80 to 84) are generated from the first signals and/or the second signals and these control signals characterize the start and the end of the measuring operation on the geometric element and the validity of the coordinate measurement values (X, Y, Z).

Abstract: The invention is directed to a spring joint having two holding bodies. The spring joint is fixedly attached to a base at one of the holding bodies. The second holding body is provided for the attachment of a component which is intended to undergo a pivot movement relative to the base during operation. A spring element acts as a connecting body between the two holding bodies. A stop is mounted on the spring joint so that the spring joint can be used again after impact loads or intermittent vibration. This stop includes at least one stop body which limits the movement range of the spring body in the spring joint for radial and axial load to the elastic range.