Abstract: Methods for depositing a hardmask with ions implanted at different tilt angles are described herein. By performing ion implantation to dope an amorphous carbon hardmask at multiple tilt angles, an evenly distributed dopant profiled can be created. The implant tilt angle will determine a dopant profile that enhances the carbon hardmask hardness.

Abstract: A method of forming a FinFET device. The method may include providing a substrate having a single crystalline region, heating the substrate to a substrate temperature effective for dynamically removing implant damage during ion implantation, implanting ions into the substrate while the substrate is maintained at the substrate temperature, and patterning the single crystalline region so as to form a single crystalline fin.

Abstract: An ion implanter includes a platen having a clamping surface configured to support a wafer for treatment with ions, the platen also having at least one pair of electrodes under the clamping surface, a clamping power supply configured to provide an AC signal to the at least one pair of electrodes and a sensed signal representative of the AC signal, and a controller. The controller is configured to receive the sensed signal from the clamping power supply when no wafer is clamped to the clamping surface. The controller is further configured to monitor the sensed signal and determine if the sensed signal is representative of deposits on the clamping surface exceeding a predetermined deposit threshold.

Abstract: A method of forming a FinFET device. The method may include providing a substrate having a single crystalline region, heating the substrate to a substrate temperature effective for dynamically removing implant damage during ion implantation, implanting ions into the substrate while the substrate is maintained at the substrate temperature, and patterning the single crystalline region so as to form a single crystalline fin.

Abstract: Film changing equipment for rapidly changing films contained in flexible sheaths in radiological X-ray equipment, in which the sheaths containing the films are conveyed by endless conveyor belts which are transparent to X-rays from a magazine into the correct position for the X-ray exposure and then transferred into a delivery box under the control of switch means. The switch means cause the conveyor belts either to pick up the next available sheath in the magazine or to leave it in the magazine. At least one pair of cooperating endless belts convey the next available sheath presented to them by feed means in the magazine into exposure position by tightly enclosing and gripping each sheath between adjacent faces of codirectionally and synchronously travelling portions of said endless belts.