Patents by Inventor Kurt E. Gsteiger

Kurt E. Gsteiger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for selective deposition of tungsten on silicon
    Patent number: 4595608
    Abstract: A metal is selectively chemically vapor deposited on a substrate through openings in a moisture adsorbing mask layer by maintaining moisture in the mask layer. Thick metal layers are formed by precharging the mask with moisture. Also a cleaned tube is prepared for selective deposition by operating the process with a bare substrate until the tube is coated. The selective deposition is then performed.
    Type: Grant
    Filed: November 9, 1984
    Date of Patent: June 17, 1986
    Assignee: Harris Corporation
    Inventors: Edward M. King, Kurt E. Gsteiger, Joseph S. Raby