Patents by Inventor Kurt Edward Peterson

Kurt Edward Peterson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microelectromechanical system device including a metal proof mass and a piezoelectric component
    Patent number: 9000656
    Abstract: This disclosure provides systems, apparatus, and devices and methods of fabrication for electromechanical devices. In one implementation, an apparatus includes a metal proof mass and a piezoelectric component as part of a MEMS device. Such apparatus can be particularly useful for MEMS gyroscope devices. For instance, the metal proof mass, which may have a density several times larger than that of silicon, is capable of reducing the quadrature and bias error in a MEMS gyroscope device, and capable of increasing the sensitivity of the MEMS gyroscope device.
    Type: Grant
    Filed: March 15, 2011
    Date of Patent: April 7, 2015
    Assignee: Qualcomm MEMS Technologies, Inc.
    Inventors: Justin Phelps Black, Srinivasan Kodaganallur Ganapathi, Philip Jason Stephanou, Kurt Edward Peterson, Cenk Acar, Ravindra Vaman Shenoy, Nicholas Ian Buchan