Abstract: An apparatus includes a chuck configured to hold a wafer and a tilt plate disposed beneath the chuck and adjustably connected to the chuck by a pair of upper screws and a pair of lower screws separately arranged in opposite corners of the chuck. Screw heads of the pair of upper screws rest against a top surface of the chuck, such that clockwise rotation of one of the upper screws pushes a corresponding corner of the chuck toward the tilt plate. Screw heads of the pair of lower screws rest against a bottom surface of the chuck, such that counter-clockwise rotation of one of the lower screws pushes a corresponding corner of the chuck away from the tilt plate.

Abstract: A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction. A first elongate member has a first end attached to the first actuator and a second end attached to an indenter tip that engages the surface of the sample. A second elongate member includes a first end attached to the second actuator and a second end connected to the second end of the first elongate member. The first elongate member is rigid in the first direction and compliant in the second direction, and the second elongate member is rigid in the second direction and compliant in the first direction. The first force is imparted to the indenter tip in the first direction through the first elongate member, and the second force is imparted to the indenter tip in the second direction through the second elongate member.

Abstract: A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction. A first elongate member has a first end attached to the first actuator and a second end attached to an indenter tip that engages the surface of the sample. A second elongate member includes a first end attached to the second actuator and a second end connected to the second end of the first elongate member. The first elongate member is rigid in the first direction and compliant in the second direction, and the second elongate member is rigid in the second direction and compliant in the first direction. The first force is imparted to the indenter tip in the first direction through the first elongate member, and the second force is imparted to the indenter tip in the second direction through the second elongate member.

Abstract: A system and method for sealing a doctor blade is shown. The doctor blade has a non-planar area which facilitates providing at least one substantially continuous contact on one or both sides of the doctor blade to seal the doctor blade when it is situated in a blade holder.