Patents by Inventor Kurt Kern

Kurt Kern has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER
    Publication number: 20230081544
    Abstract: A component for use inside a semiconductor chamber with a laser textured surface facing a vacuum region inside the semiconductor chamber is provided.
    Type: Application
    Filed: January 26, 2021
    Publication date: March 16, 2023
    Inventors: Pylin SAROBOL, Eric SAMULON, Pankaj HAZARIKA, Dennis SMITH, Kurt KERN, Debanjan DAS, Darrell EHRLICH, Eric A. PAPE, Matthew Brian SCHICK
  • Rotary friction welded blank for PECVD heated showerhead
    Patent number: 10941489
    Abstract: A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed. A showerhead assembly includes a stem, face plate and back plate wherein the stem is rotary friction welded to the back plate. A substrate pedestal assembly is configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.
    Type: Grant
    Filed: March 18, 2019
    Date of Patent: March 9, 2021
    Assignee: Lam Research Corporation
    Inventors: Eric Madsen, Kurt Kern
  • ROTARY FRICTION WELDED BLANK FOR PECVD HEATED SHOWERHEAD
    Publication number: 20190211451
    Abstract: A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed. A showerhead assembly includes a stem, face plate and back plate wherein the stem is rotary friction welded to the back plate. A substrate pedestal assembly is configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.
    Type: Application
    Filed: March 18, 2019
    Publication date: July 11, 2019
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Eric Madsen, Kurt Kern
  • Rotary friction welded blank for PECVD heated showerhead
    Patent number: 10266947
    Abstract: A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed. A showerhead assembly includes a stem, face plate and back plate wherein the stem is rotary friction welded to the back plate. A substrate pedestal assembly is configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.
    Type: Grant
    Filed: August 23, 2016
    Date of Patent: April 23, 2019
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Eric Madsen, Kurt Kern
  • ROTARY FRICTION WELDED BLANK FOR PECVD HEATED SHOWERHEAD
    Publication number: 20180057940
    Abstract: A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed. A showerhead assembly includes a stem, face plate and back plate wherein the stem is rotary friction welded to the back plate. A substrate pedestal assembly is configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.
    Type: Application
    Filed: August 23, 2016
    Publication date: March 1, 2018
    Inventors: Eric Madsen, Kurt Kern