Patents by Inventor Kurt Werder

Kurt Werder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-axis interferometer system using independent, single axis interferometers
    Patent number: 7518732
    Abstract: Improved systems, apparatus, and methods for detecting positions of moving stages and a reference position of a beam column are provided. For some embodiments, independent discrete interferometers may be utilized for distance measurements in each axis, rather than a cumbersome monolithic multi-axis interferometer utilized in conventional systems.
    Type: Grant
    Filed: October 22, 2007
    Date of Patent: April 14, 2009
    Inventors: William A. Eckes, Jeffrey Sullivan, Kurt Werder
  • Multi-axis interferometer system using independent, single axis interferometers
    Patent number: 7336369
    Abstract: Improved systems, apparatus, and methods for detecting positions of moving stages and a reference position of a beam column are provided. For some embodiments, independent discrete interferometers may be utilized for distance measurements in each axis, rather than a cumbersome monolithic multi-axis interferometer utilized in conventional systems.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: February 26, 2008
    Assignee: Applied Materials, Inc.
    Inventors: William A. Eckes, Jeffrey Sullivan, Kurt Werder
  • MULTI-AXIS INTERFEROMETER SYSTEM USING INDEPENDENT, SINGLE AXIS INTERFEROMETERS
    Publication number: 20080043246
    Abstract: Improved systems, apparatus, and methods for detecting positions of moving stages and a reference position of a beam column are provided. For some embodiments, independent discrete interferometers may be utilized for distance measurements in each axis, rather than a cumbersome monolithic multi-axis interferometer utilized in conventional systems.
    Type: Application
    Filed: October 22, 2007
    Publication date: February 21, 2008
    Inventors: WILLIAM ECKES, Jeffrey Sullivan, Kurt Werder
  • Multi-axis interferometer system using independent, single axis interferometers
    Publication number: 20070076216
    Abstract: Improved systems, apparatus, and methods for detecting positions of moving stages and a reference position of a beam column are provided. For some embodiments, independent discrete interferometers may be utilized for distance measurements in each axis, rather than a cumbersome monolithic multi-axis interferometer utilized in conventional systems.
    Type: Application
    Filed: September 30, 2005
    Publication date: April 5, 2007
    Inventors: William Eckes, Jeffrey Sullivan, Kurt Werder
  • Stabilizing support mechanism for electron beam apparatus
    Patent number: 5644137
    Abstract: An electron beam apparatus is provided with a support mechanism upon which X and Y axis interferometers are mounted within a vacuum chamber. By employing a flat ring of a low coefficient of thermal expansion glass ceramic composition affixed beneath the chamber upper wall and to which the interferometers are mounted, the normal extremes of vacuum and heat as existing within the chamber are resisted to insure of a fixed horizontal alignment of the beams as projected by the interferometers during operation of the apparatus. Flexure mounts are included for the interferometer ring together with a magnetic shield disposed adjacent the ring undersurface. Stability of workpieces is further enhanced by the use of the same glass ceramic composition in the formation of the carrier and its reference plate of the apparatus.
    Type: Grant
    Filed: March 4, 1996
    Date of Patent: July 1, 1997
    Inventors: Herbert A. Waggener, Kurt Werder