Abstract: Disclosed is a substrate processing apparatus in which weight of a buffer module may be reduced compared to the apparatus in the related art.

Abstract: Provided are a control unit that predicts the life of an inkjet head unit and maximizes its life to be used, and a substrate treating apparatus including the same. The control unit performs maintenance of an inkjet head unit for discharging a substrate treatment liquid onto a substrate and comprises a count module for counting the number of discharges for each nozzle of the inkjet head unit, a comparison module for comparing the number of discharges with a reference value to determine whether the number of discharges is equal to or greater than the reference value, and an evaluation module for evaluating whether a life of the inkjet head unit has reached a usable life based on whether the number of discharges of each nozzle is equal to or greater than the reference value.

Abstract: A static electricity visualization apparatus capable of visually identifying a measured level of static electricity is provided.

Abstract: Provided is a method for preparing a silica layer, comprising bringing to gelation a precursor layer formed from a precursor composition comprising a silica precursor, an acid catalyst and a surfactant.

Abstract: Power semiconductor device with reduced loss and manufacturing method the same disclosed. Power semiconductor device include a first drift region of a first conductivity type, a second drift region of the first conductivity type formed by epitaxially growing on the first drift region and a plurality of buried ion regions of a second conductivity type formed to be buried in the second drift region.

Abstract: Silicon carbide power semiconductor device having uniform channel length and manufacturing method thereof disclosed. The power semiconductor device includes a drift region of a first conductivity type, a plurality of body regions of a second conductivity type, being formed to be spaced apart from each other with a preset WS in a horizontal direction in an upper region of the drift region, a JFET region of the first conductivity type and a low-resistance region of the first conductivity type, being formed in a separation space between adjacent body regions to contact their side surfaces with the adjacent body regions and a source region of the first conductivity type, being formed in a surface region in the body region in contact with the low-resistance region to be spaced apart from the low-resistance region by a preset channel length.

Abstract: Silicon carbide power semiconductor device having uniform channel length and manufacturing method thereof disclosed. The power semiconductor device includes a drift region of a first conductivity type, a plurality of body regions of a second conductivity type, being formed to be spaced apart from each other with a preset WS in a horizontal direction in an upper region of the drift region, a JFET region of the first conductivity type and a low-resistance region of the first conductivity type, being formed in a separation space between adjacent body regions to contact their side surfaces with the adjacent body regions and a source region of the first conductivity type, being formed in a surface region in the body region in contact with the low-resistance region to be spaced apart from the low-resistance region by a preset channel length.

Abstract: Power semiconductor device with dual shield structure in silicon carbide and manufacturing method thereof disclosed.

Abstract: Power semiconductor device with reduced loss and manufacturing method the same disclosed. Power semiconductor device include a first drift region of a first conductivity type, a second drift region of the first conductivity type formed by epitaxially growing on the first drift region and a plurality of buried ion regions of a second conductivity type formed to be buried in the second drift region.

Abstract: Power semiconductor device capable of controlling slope of current and voltage during dynamic switching disclosed. The power semiconductor device may include a semiconductor substrate and a cell array being consisted of a plurality of transistor cells on an active area, wherein each of the plurality of transistor cells may include an emitter region, a body region, a contact region and a gate region, wherein non-uniform threshold voltages may be respectively set in the plurality of transistor cells constituting the cell array, wherein a gate signal may be applied to each of the plurality of transistor cells through an input/output unit, wherein the input/output unit may include a first gate signal path configured for supplying a gate charging current to the gate regions in each of the plurality of transistor cells and a second gate signal path configured for discharging a gate discharging current from the gate region.

Abstract: A hybrid comparator includes an analog signal combiner and a dynamic latch. The analog signal combiner is configured to receive an input analog signal and an input reference signal, and generate an analog output signal by combining the input analog signal and the input reference signal. The dynamic latch is configured to receive the analog output signal and a clock signal, and generate a digital output signal.

Abstract: A MOS-gate power semiconductor device includes: a main device area including an active area and an edge termination area; and an auxiliary device area horizontally formed outside the main device area so as to include one or more diodes. Accordingly, it is possible to protect a circuit from an overcurrent and thus to prevent deterioration and/or destruction of a device due to the overcurrent.

Abstract: A charge-balance power device and a method of manufacturing the charge-balance power device are provided. The charge-balance power device includes: a charge-balance body region in which one or more first conductive type pillars as a first conductive type impurity region and one or more second conductive type pillars as a second conductive type impurity region are arranged; a first conductive type epitaxial layer that is formed on the charge-balance body region; and a transistor region that is formed in the first conductive type epitaxial layer. With this invention, it is possible to form the same charge-balance body region regardless of the structure of the transistor region formed on the top side of wafer.

Abstract: A MOS-gate power semiconductor device includes: a main device area including an active area and an edge termination area; and an auxiliary device area horizontally formed outside the main device area so as to include one or more diodes. Accordingly, it is possible to protect a circuit from an overcurrent and thus to prevent deterioration and/or destruction of a device due to the overcurrent.

Abstract: A MOS-gate power semiconductor device is provided which includes: one or more P-type wells formed under one or more of a gate metal electrode and a gate bus line and electrically connected to an emitter metal electrode; and one or more N-type wells formed in the P-type well and electrically connected to one or more of the gate metal electrode and the gate bus line. According to this configuration, it is possible to suppress deterioration and/or destruction of a device due to an overcurrent.

Abstract: Provided are a power semiconductor device using a silicon substrate as a FS layer and a method of manufacturing the same. A semiconductor substrate of a first conductivity type is prepared. An epitaxial layer is grown on one surface of the semiconductor substrate. Here, the epitaxial layer is doped at a concentration lower than that of the semiconductor substrate and is intended to be used as a drift region. A base region of a second conductivity type is formed in a predetermined region of the epitaxial layer. An emitter region of the first conductivity type is formed in a predetermined region of the base region. A gate electrode with a gate insulating layer is formed on the base region between the emitter region and the drift region of the epitaxial layer. A rear surface of the semiconductor substrate is ground to reduce the thickness of the semiconductor substrate, thereby setting an FS region of the first conductivity type.

Abstract: Provided are a power semiconductor device using a silicon substrate as a FS layer and a method of manufacturing the same. A semiconductor substrate of a first conductivity type is prepared. An epitaxial layer is grown on one surface of the semiconductor substrate. Here, the epitaxial layer is doped at a concentration lower than that of the semiconductor substrate and is intended to be used as a drift region. A base region of a second conductivity type is formed in a predetermined region of the epitaxial layer. An emitter region of the first conductivity type is formed in a predetermined region of the base region. A gate electrode with a gate insulating layer is formed on the base region between the emitter region and the drift region of the epitaxial layer. A rear surface of the semiconductor substrate is ground to reduce the thickness of the semiconductor substrate, thereby setting an FS region of the first conductivity type.

Abstract: An MOS transistor in the surface of a semiconductor substrate (180) of a first conductivity type, which has a grid of isolations (171) in the surface, each grid unit surrounding a rectangular semiconductor island (102). Each island contains three parallel regions of the opposite conductivity type: the center region (104) is operable as the transistor drain and the two other regions (103 and 105), abutting the isolations, are operable as transistor sources. Transistor gates (106 and 107) are between the parallel regions, completing the formation of two transistors having one common drain. Electrical contacts (108) are placed on both source regions and the drain region. The source contacts are placed so that the spacing (120) between each contact and its respective isolation is at least twice as large as the spacing (121) between each contact and the gate.

Abstract: An MOS transistor in the surface of a semiconductor substrate (180) of a first conductivity type, which has a grid of isolations (171) in the surface, each grid unit surrounding a rectangular semiconductor island (102). Each island contains three parallel regions of the opposite conductivity type: the center region (104) is operable as the transistor drain and the two other regions (103 and 105), abutting the isolations, are operable as transistor sources. Transistor gates (106 and 107) are between the parallel regions, completing the formation of two transistors having one common drain. Electrical contacts (108) are placed on both source regions and the drain region. The source contacts are placed so that the spacing (120) between each contact and its respective isolation is at least twice as large as the spacing (121) between each contact and the gate.

Abstract: An MOS transistor in the surface of a semiconductor substrate (180) of a first conductivity type, which has a grid of isolations (171) in the surface, each grid unit surrounding a rectangular substrate island (102). Each island contains two parallel regions of the opposite conductivity type: one region (174) is operable as the transistor drain and the other region (173) is operable as the transistor drain, each region abutting the isolation. A transistor gate (105) is between the parallel regions, completing the formation of a transistor. Electrical contacts (106) are placed on the source region (173) so that the spacing (120) between each contact and the adjacent isolation is at least twice as large as the spacing (121) between each contact and the gate. A plurality of these islands are interconnected to form a multi-finger MOS transistor.