Abstract: Embodiments described herein relate to an optical device and methods of forming an optical device. The optical device includes a substrate, an illumination source, a capping layer, an encapsulation layer, and a passivation layer. The encapsulation layer includes a first atomic layer deposition (ALD) layer, a chemical vapor deposition (CVD) layer, and a second ALD layer. The method includes disposing a capping layer over an illumination layer, the illumination layer disposed over a substrate in a processing chamber; disposing a first atomic layer deposition (ALD) layer over the capping layer; disposing a chemical vapor deposition (CVD) layer over the first ALD layer; disposing a second ALD layer over the CVD layer; and disposing a passivation layer over the second ALD layer.

Abstract: Embodiments of the disclosure relate to articles and transistor structures and methods of preparation and use thereof, including a substrate and an amorphous oxide film overlaying at least a portion of the substrate, where the amorphous oxide film includes a first oxide and a second oxide. The first oxide can include zirconium oxide (ZrO2), hafnium oxide (HfO2) or a combination thereof, the second oxide can include silicon dioxide (SiO2), aluminum oxide (Al2O3), nitric oxide (NO) or combinations thereof. The amorphous oxide film can conformal and have a porosity of less than about 1% and may have a dielectric constant (k) of about 8 to about 28.

Abstract: Embodiments described herein provide a chamber having a gas flow inlet guide to uniformly deliver process gas. The gas flow inlet guide having a flow guide bottom plate having an opening. A top plate is disposed over the flow guide bottom plate and a plasma blocker is disposed over the opening. The plasma blocker includes one or more apertures sized based one or more of a plasma density, an electron temperature, an ion temperature, or a characteristic of a process gas.

Abstract: A scribing apparatus for manufacturing a solar cell, and a method of manufacturing a solar cell using the same are provided. The scribing apparatus includes a stage part configured to support a substrate having at least one thin film layer, a scribing unit configured to scribe on the at least one thin film layer, and a moving unit configured to move at least one of the stage part and the scribing unit during the scribing process. A method of manufacturing a solar cell using the scribing apparatus includes scribing a first pattern onto a reflective electrode layer using the scribing apparatus, the reflective electrode layer being on the substrate, the scribing apparatus further including a needle installation part having a first needle configured to scribe on one side of the reflective electrode layer, and a second needle configured to scribe on a side surface of the reflective electrode layer.

Abstract: A solar cell includes a substrate, a rear electrode layer on the substrate, a light-absorption layer on the rear electrode layer, the light-absorption layer including Se and S, and a buffer layer on the light-absorption layer; the light-absorption layer including a depletion region extending from a surface of the light-absorption layer adjacent to the buffer layer, the depletion region having an average S/(Se+S) mole ratio in a range of about 0.10 to about 0.30.

Abstract: A solar cell having improved electric energy generation efficiency and a method of manufacturing the solar cell. The solar cell includes a substrate, a rear electrode layer on the substrate and comprising a first rear electrode and a second rear electrode spaced from each other, a window electrode layer on the rear electrode layer and comprising a first window electrode electrically coupled to the second rear electrode at a contact region on the second rear electrode, a light-absorbing layer between the rear electrode layer and the window electrode layer, and an insulating layer on a first portion of the second rear electrode, wherein the first portion is between an edge of the second rear electrode facing the first rear electrode and the contact region.

Abstract: A solar cell in which the P-type light absorbing layer is thin, and the nanoparticles are disposed. Although the P-type light absorbing layer is thin, the light absorption efficiency may be increased by the use of nanoparticles. Accordingly, the P-type light absorbing layer is formed thin, and thereby the material cost may be reduced and the process time may be shortened. Also, a solar cell in which the nanoparticles are disposed on the transparent electrode layer or inside the transparent electrode layer, and the size of the nanoparticles and the space between them are controlled such that the light absorption efficiency may be increased, and the nanoparticles are disposed in the N-type light absorbing layer, and the size of the nanoparticles and the space between them are controlled such that the light absorption efficiency may be increased.

Abstract: A solar cell with improved energy efficiency is presented. The solar cell includes a substrate having a plurality of cell areas separated by a cell separation area, back electrodes spaced apart from each other by a gap, a light absorbing layer, a transparent electrode layer, and a buffer layer. Each of the back electrodes is disposed over neighboring cell areas and a cell separation area. The light absorbing layer is disposed on the back electrodes and in the gap to absorb incident light. A contact hole extends through the light absorbing layer to a portion of the back electrodes. The transparent electrode layer disposed on the light absorbing layer connects to the back electrodes through the contact hole. The buffer layer is disposed between the light absorbing layer and the transparent electrode layer to cover upper and side surfaces of the light absorbing layer.