Abstract: A self-sensing dielectric actuator system. The system has a deformable dielectric material between two electrodes. A relatively low frequency actuating signal is applied to the electrodes and thereby causes the dielectric material to deform, moving at least one electrode. A relatively high frequency sensing signal applied across the electrodes indicates how far the electrode has moved. The system may be calibrated by using a laser or other sensor to mechanically measure the amount of movement. An object may be displaced a desired distance by coupling the object to the electrode and using the sensing signal to measure how far the object has moved.