Abstract: An abrasive article is provided which includes a peripheral surface formed comprising a grinding aid. The grinding aid is formed from a mixture including an acid and at least one of an inorganic metal phosphate salt or an inorganic metal sulfate salt. The acid is preferably selected so that the mixture forms a film. The abrasive article preferably has sharp abrasive particles. The inventive abrasive article improves grinding efficacy, particularly in titanium grinding processes, as compared to abrasive articles that are substantially devoid of a grinding aid of the present invention. Also provided is a method for making an abrasive article and a method of abrading a surface with an abrasive article.

Abstract: A method of modifying an exposed surface of a semiconductor wafer that includes the steps of:(a) contacting the surface with a fixed abrasive article having a three-dimensional textured abrasive surface that includes a plurality of abrasive particles and a binder in the form of a pre-determined pattern; and(b) relatively moving the wafer and the fixed abrasive article to modify said surface of the wafer.

Abstract: A coated abrasive article comprised of a backing having a layer of grains adherently bonded thereto by a binding material, wherein the layer of grains comprises abrasive grains and nonabrasive composite grains, and the nonabrasive composite grains comprise inorganic nonabrasive particles bonded together by a binder selected from the group consisting of a metal salt of fatty acid, colloidal silica, and combinations thereof. The abrasive article has an unexpected abrading efficiency, performing equal to, or superior to, a coated abrasive article containing only abrasive grains. The invention also relates to a bonded abrasive article comprising the abrasive grains and nonabrasive composite grains adhered together.

Abstract: An abrasive article, and methods of making and using same, comprising an inorganic phosphate selected from the group consisting of an alkali metal metaphosphate, an alkaline earth metal metaphosphate, and a Group IIIA metal orthophosphate; the inorganic phosphate may be present in a peripheral coating layer of a coated abrasive article, or an abrasive slurry coating in a uniform thickness, or a structured abrasive article.

Abstract: A coated abrasive article comprised of a backing having a layer of grains adherently bonded thereto by a binding material, wherein the layer of grains comprises abrasive grains and nonabrasive composite grains, and the nonabrasive composite grains comprise inorganic nonabrasive particles bonded together by a binder selected from the group consisting of a metal salt of fatty acid, colloidal silica, and combinations thereof. The abrasive article has an unexpected abrading efficiency, performing equal to, or superior to, a coated abrasive article containing only abrasive grains. The invention also relates to a bonded abrasive article comprising the abrasive grains and nonabrasive composite grains adhered together.

Abstract: Abrasive articles are described that include a plurality of abrasive particles, a plurality of coated grinding aid particles, the coated grinding aid particles comprising grinding aid particles coated with an inert, hydrophobic, hydrocarbon-containing substance, and a binder in which the abrasive particles and the coated grinding aid particles are dispersed.

Abstract: Grinding aid particles coated with an inert, hydrophobic, hydrocarbon-containing substance such as fatty acids, fatty acid salts, and oils, and erodible agglomerates comprising a plurality of the coated grinding aid particles are disclosed.