Patents by Inventor Kwon Lim

Kwon Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods, assemblies and systems for inspecting a photomask
    Patent number: 7808629
    Abstract: A method of inspecting a photomask, the method comprising, inspecting at least a portion of the photomask to provide a location of defects having with a first resolution, determining at least one defect region in the location of the defects, the defect region having a defect therein, and imaging the at least one defect region to provide a defect image having a second resolution that is finer than the first resolution.
    Type: Grant
    Filed: October 1, 2007
    Date of Patent: October 5, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kwon Lim, Do-young Kim
  • METHODS, ASSEMBLIES AND SYSTEMS FOR INSPECTING A PHOTOMASK
    Publication number: 20080079931
    Abstract: A method of inspecting a photomask, the method comprising, inspecting at least a portion of the photomask to provide a location of defects having with a first resolution, determining at least one defect region in the location of the defects, the defect region having a defect therein, and imaging the at least one defect region to provide a defect image having a second resolution that is finer than the first resolution.
    Type: Application
    Filed: October 1, 2007
    Publication date: April 3, 2008
    Inventors: Kwon Lim, Do-young Kim