Patents by Inventor Kwon-yuong Jang

Kwon-yuong Jang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6168499
    Abstract: The present invention provides a grinding apparatus for semiconductor wafers for preventing the silicon powder generated from the wafer grinding process and mixed with cooling water from contaminating height gauges of the grinding apparatus because the silicon powder is scattered toward them, and for preventing wear-down of the contact heads of the height gauges due to the abrasion with a wafer to be fixed on a spin-chuck and the spin-chuck.
    Type: Grant
    Filed: May 18, 1999
    Date of Patent: January 2, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kwon-yuong Jang