Patents by Inventor Kwun-Goo Hung

Kwun-Goo Hung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of calibrating a wafer edge gripping end effector
    Patent number: 6678581
    Abstract: A method of calibrating a wafer edge gripping end effector. A wafer calibration tool is held in a stationary position simulating the position of a semiconductor wafer to be picked up by the wafer edge gripping end effector. A controller associated with a robot having an end effector attached to a robot arm thereto is turned off. The robot arm and end effector are moved to position where the first and second clamp structures on the end effector each engage a respective inner edge that in part defines a notch formed in the wafer calibration tool. An actuator driven movable clamp structure is manually advanced so that the movable clamp structure engages an inner edge that in part defines one of the notches formed in the wafer calibration tool. The controller is turned on and data regarding the location of robot arm, end effector and movable clamp structure is stored.
    Type: Grant
    Filed: January 14, 2002
    Date of Patent: January 13, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd
    Inventors: Kwun-Goo Hung, Tung-Li Lee, Ko-Chin Chung, Fan-Lin Lu
  • Method of calibrating a wafer edge gripping end effector
    Publication number: 20030135302
    Abstract: A method of calibrating a wafer edge gripping end effector. A wafer calibration tool is held in a stationary position simulating the position of a semiconductor wafer to be picked up by the wafer edge gripping end effector. A controller associated with a robot having an end effector attached to a robot arm thereto is turned off. The robot arm and end effector are moved to position where the first and second clamp structures on the end effector each engage a respective inner edge that in part defines a notch formed in the wafer calibration tool. An actuator driven movable clamp structure is manually advanced so that the movable clamp structure engages an inner edge that in part defines one of the notches formed in the wafer calibration tool. The controller is turned on and data regarding the location of robot arm, end effector and movable clamp structure is stored.
    Type: Application
    Filed: January 14, 2002
    Publication date: July 17, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kwun-Goo Hung, Tung-Li Lee, Ko-Chin Chung, Fan-Lin Lu