Patents by Inventor Kyeong Hee KANG

Kyeong Hee KANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND EQUIPMENT FOR LEAKAGE TESTING OF ELECTROSTATIC CHUCK
    Publication number: 20230204448
    Abstract: The present invention provides a method for leakage testing of an electrostatic chuck. The method for leakage testing of an electrostatic chuck comprises: a mounting step of mounting the electrostatic chuck on a test stage of a testing chamber; a loading step of loading a dummy substrate in an upper surface of the electrostatic chuck; a decompression step of decompressing an interior of the testing chamber; a tracking fluid supply step of supplying a tracking fluid with visibility to a flow path of the electrostatic chuck; a photographing step of photographing the electrostatic chuck; and a determination step of determining whether a leakage occurs in the flow path by examining an image photographed in the photographing step.
    Type: Application
    Filed: December 28, 2022
    Publication date: June 29, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Da-Som BAE, Kyeong Hee KANG, Young Ran KO, Mi Young JO
  • APPARATUS AND METHOD FOR INSPECTING GAS LEAK
    Publication number: 20230204449
    Abstract: Provided are an apparatus and method for inspecting a gas leak.
    Type: Application
    Filed: June 17, 2022
    Publication date: June 29, 2023
    Inventors: Mi Young JO, Kyeong Hee KANG, Young Ran KO, Da Som BAE