Patents by Inventor Kyeong Soon Kim

Kyeong Soon Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SURFACE TREATMENT METHOD OF POLISHING PAD AND POLISHING METHOD OF WAFER USING THE SAME
    Publication number: 20130115859
    Abstract: Provided is a surface treatment method of a polishing pad. The surface treatment method of the polishing pad includes locating a wafer on the polishing pad including a polishing material, supplying a polishing pad polishing material between the polishing pad and the wafer to expose the polishing material included in the polishing pad, and polishing the wafer using the exposed polishing material.
    Type: Application
    Filed: November 5, 2012
    Publication date: May 9, 2013
    Inventors: Se Hun Choi, Kyeong Soon Kim, Young Hee Mun