Abstract: A fixture for cleaning a pedestal of a substrate processing system includes first and second portions of the fixture, a plurality of fasteners, and an adapter. The first portion is configured to couple to a first surface of a base portion of the pedestal. The first portion includes a first port configured to fluidly connect with a plenum in the base portion of the pedestal. The second portion is configured to couple to a second surface of the base portion of the pedestal. The fasteners are configured to fasten the first and second portions of the fixture to clamp the base portion of the pedestal between the first and second portions of the fixture. The adapter is configured to couple to a conduit in a stem portion of the pedestal. The adapter includes a second port configured to fluidly connect with the plenum via the conduit.

Abstract: A medical oral treatment face mask includes a mask body and a band set. The mask body includes a water-repellent layer, an isolation layer and a water-absorbent layer. The isolation layer, which along with the water-repellent layer has a corresponding opening. The water-absorbent layer is arranged between the water-repellent layer and the isolation layer. The band set is fixed on two sides of the mask body.