Patents by Inventor Kyle M. LETOURNEAU

Kyle M. LETOURNEAU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus
    Patent number: 10607879
    Abstract: A substrate processing apparatus including a frame and at least one substrate transport arm having at least one end effector, each end effector having a base portion, a first and second substrate support tines mounted to and dependent from the base portion where at least one of the first and second substrate support tines is movable relative to the base portion, each of the first and second substrate support tines having respective substrate contacts configured to contact and support a substrate held by the end effector between the respective contacts of the first and second substrate support tines at a substrate support seat dimension span between the substrate contacts of the first and second substrate support tines, and an end effector drive section configured to vary a distance between the first and second substrate support tines relative to each other on the fly.
    Type: Grant
    Filed: September 1, 2017
    Date of Patent: March 31, 2020
    Assignee: BROOKS AUTOMATION, INC.
    Inventors: Jeffrey A. Cavins, Leigh F. Sharrock, Kyle M. Letourneau, Stacey McKinney, Dave Jarzynka
  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20180068881
    Abstract: A substrate processing apparatus including a frame and at least one substrate transport arm having at least one end effector, each end effector having a base portion, a first and second substrate support tines mounted to and dependent from the base portion where at least one of the first and second substrate support tines is movable relative to the base portion, each of the first and second substrate support tines having respective substrate contacts configured to contact and support a substrate held by the end effector between the respective contacts of the first and second substrate support tines at a substrate support seat dimension span between the substrate contacts of the first and second substrate support tines, and an end effector drive section configured to vary a distance between the first and second substrate support tines relative to each other on the fly.
    Type: Application
    Filed: September 1, 2017
    Publication date: March 8, 2018
    Inventors: Jeffrey A. CAVINS, Leigh F. SHARROCK, Kyle M. LETOURNEAU, Stacy MCKINNEY, Dave JARZYNKA