Patents by Inventor Kyle Stanton

Kyle Stanton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for dry gas phase chemically etching a structure
    Patent number: 10079150
    Abstract: According to the invention there is provided a method of dry gas phase chemically etching a structure comprising the steps of: positioning the structure in an etch chamber, the structure comprising a first material and a second material, wherein the first material is selected from silicon, molybdenum, germanium, SiGe and tungsten, the second material is silicon dioxide or silicon nitride, and at least one surface of the first material is exposed so as to be contactable by a gas phase chemical etchant; etching the first material with a noble gas fluoride or halogen fluoride gas phase chemical etchant; and exposing the etch chamber to water vapour so that the step of etching the first material is performed in the presence of water vapour.
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: September 18, 2018
    Assignee: SPTS Technologies Limited
    Inventors: John Joseph Neumann, Jr., Kyle Stanton Lebouitz
  • METHOD AND APPARATUS FOR DRY GAS PHASE CHEMICALLY ETCHING A STRUCTURE
    Publication number: 20170025282
    Abstract: According to the invention there is provided a method of dry gas phase chemically etching a structure comprising the steps of: positioning the structure in an etch chamber, the structure comprising a first material and a second material, wherein the first material is selected from silicon, molybdenum, germanium, SiGe and tungsten, the second material is silicon dioxide or silicon nitride, and at least one surface of the first material is exposed so as to be contactable by a gas phase chemical etchant; etching the first material with a noble gas fluoride or halogen fluoride gas phase chemical etchant; and exposing the etch chamber to water vapour so that the step of etching the first material is performed in the presence of water vapour.
    Type: Application
    Filed: July 23, 2015
    Publication date: January 26, 2017
    Inventors: John Joseph NEUMANN, JR., Kyle Stanton LEBOUITZ
  • Braking control system for a vehicle being towed by another vehicle
    Patent number: 6845851
    Abstract: A system for controlling the braking system of a towed vehicle being towed by a towing vehicle having a towing vehicle subsystem for the towing vehicle and a towed vehicle subsystem for the towed vehicle. The towing vehicle subsystem includes a towing vehicle control mechanism having a brakes-on indicator and a towing vehicle receiver mechanism for receiving wireless modulated digital signals.
    Type: Grant
    Filed: January 21, 2004
    Date of Patent: January 25, 2005
    Assignee: Automatic Equipment Manufacturing Co.
    Inventors: Robert A. Donaldson, Surgit Gill, Kyle Stanton