Patents by Inventor Kyo-Jun Ahn

Kyo-Jun Ahn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shield unit for TiN sputtering apparatus, method of coating the same, and sputtering method
    Publication number: 20060137970
    Abstract: The present invention relates to a shield unit for a titanium nitride (TiN) sputtering apparatus that can reduce or prevent generation of unwanted particles. An exemplary shield unit for the sputtering apparatus according to an embodiment of the present invention includes an upper shield having a titanium (Ti) coating on an upper portion thereof and (optionally) an aluminum (Al) coating on a lower portion thereof, and a lower shield having a titanium (Ti) on at least part of a sidewall thereof and (optionally) an aluminum (Al) on a bottom surface thereof.
    Type: Application
    Filed: December 23, 2005
    Publication date: June 29, 2006
    Inventor: Kyo-Jun Ahn