Patents by Inventor Kyo Jun JEON

Kyo Jun JEON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER BOAT ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
    Publication number: 20180114706
    Abstract: A wafer boat assembly including a boat, a pedestal, and a base. The boat includes a slot to hold a wafer and a rod including a gas line. The pedestal includes a first surface and a connection line coupled to the gas line. The base is on a second surface of the pedestal, rotates the pedestal, and supplies gas to the connection line. The boat is on the first surface of the pedestal. The gas flows along the gas line and is dispensed from a location where the rod contacts the wafer to levitate the wafer.
    Type: Application
    Filed: April 24, 2017
    Publication date: April 26, 2018
    Inventors: Sang Ryol YANG, Kyo Jun JEON, Kun Tack LEE, Jong Heun LIM