Patents by Inventor Kyohei Horikawa

Kyohei Horikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    Publication number: 20220037127
    Abstract: To provide a plasma processing apparatus or a plasma processing method capable of improving a reliability or a yield.
    Type: Application
    Filed: June 19, 2020
    Publication date: February 3, 2022
    Inventors: Shintarou Nakatani, Kyohei Horikawa, Kohei Sato