Patents by Inventor Kyohei KOIKE

Kyohei KOIKE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR PRODUCING RESIST FILM
    Publication number: 20210325780
    Abstract: A method of producing a resist film includes: a laminating step of fabricating a workpiece by laminating the resist film on an etching target film; and an infiltration step of exposing the workpiece to a gas of a precursor containing a metal having a higher EUV light absorption rate than carbon to infiltrate the metal into the resist film.
    Type: Application
    Filed: August 22, 2019
    Publication date: October 21, 2021
    Inventors: Kazuki YAMADA, Kyohei KOIKE, Masatoshi YAMATO, Hidetami YAEGASHI