Abstract: Ions obtained through EI process from a first gas are subjected to mass analysis to obtain ion intensities which are stored in a first file, and ions obtained through soft ionization process from a second gas having same concentration of components as that of the first gas are subjected to mass analysis to obtain ion intensities which stored in a second file, and molecular weights are determined based on parent ions from soft ionization measurement data. A mass spectrum corresponding to the determined molecular weight is read out based on an NIST database, and the ion intensity data stored in the first file and the read out NIST data are compared with each other, and component molecules of the first gas are determined based on the comparison results. Qualitative analysis of mixed gas can be conducted in real time with high accuracy by making effective use of the measurement data of both mass analysis based on EI process and mass analysis based on soft ionization process.

Abstract: Ions obtained through EI process from a first gas are subjected to mass analysis to obtain ion intensities which are stored in a first file, and ions obtained through soft ionization process from a second gas having same concentration of components as that of the first gas are subjected to mass analysis to obtain ion intensities which stored in a second file, and molecular weights are determined based on parent ions from soft ionization measurement data. A mass spectrum corresponding to the determined molecular weight is read out based on an NIST database, and the ion intensity data stored in the first file and the read out NIST data are compared with each other, and component molecules of the first gas are determined based on the comparison results. Qualitative analysis of mixed gas can be conducted in real time with high accuracy by making effective use of the measurement data of both mass analysis based on EI process and mass analysis based on soft ionization process.