Abstract: The present invention measures jitter in a galvano scanner that scans a light beam on a surface to be scanned by periodically turning a reflection mirror in a reciprocating manner. Two detectors for detecting and receiving the light beam are mounted near both ends of the scan region of the light beam, a first detection signal of each of the two detectors is extracted whenever the reflection mirror is activated for one scanning, a required time for one scanning is computed from the extracted detection signals, and a variation in the required time for each scanning is measured based on the computed required time.

Abstract: An object of the present invention is to provide an MEMS mirror scanner capable of achieving a scanning operation at a speed equivalent to or higher than a polygon mirror scanner and including a supporting structure for a flexible mirror, which can be driven even by drive force having a small electrostatic force. A scanning mirror is formed between a pair of suspension beams formed in a rod-like manner and arranged on the same straight line on a substrate and is oscillatably supported by using the straight line as an oscillation axis, and further, an electrostatic capacity drive unit is disposed along either side or both sides of the suspension beam.

Abstract: The present invention measures jitter in a galvano scanner that scans a light beam on a surface to be scanned by periodically turning a reflection mirror in a reciprocating manner. Two detectors for detecting and receiving the light beam are mounted near both ends of the scan region of the light beam, a first detection signal of each of the two detectors is extracted whenever the reflection mirror is activated for one scanning, a required time for one scanning is computed from the extracted detection signals, and a variation in the required time for each scanning is measured based on the computed required time.

Abstract: A plate-type-ozonizer discharge cell including a pair of planar electrodes separated by a dielectric to ozonize a material gas circulating through a discharge space formed between one of the planar electrodes and the dielectric by way of discharge. In addition, the dielectric includes at least one ceramic block having a plurality of ceramic layers integrally superimposed on each other in a layer thickness direction. Also included is a method of manufacturing an ozonizer discharge cell, which includes providing a plurality of ceramic sheets to be baked, and superimposing the ceramic sheets in a layer thickness direction. Then the plurality of ceramic layers are baked so as to form a ceramic block.

Abstract: An optical disk drive for recording and reproducing information on an optical disk medium includes a servo circuit for controlling tracking of a light beam on a predetermined track and a servo circuit for controlling focus of the light beam on the disk surface. The disk surface is divided into a plurality of regions, and calibration values for adjusting the servo circuits are determined in each region. The calibration values are stored in a memory and are used to adjust the servo circuits during tracking on a predetermined track. The calibration values include tracking offset values, focus offset values, servo deviation threshold values and sensor gain values. A number of techniques are disclosed for automatically determining the calibration values.