Patents by Inventor Kyoko Asahina

Kyoko Asahina has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection analyzing apparatus and semiconductor device
    Patent number: 6551847
    Abstract: A monitor wafer is processed by a processing apparatus, and thereafter, it is subjected to an inspection in a foreign object inspection apparatus in accordance with an inspection recipe. A measured result obtained by the inspection is compiled and analyzed in a data management system. Generally, a monitor wafer is not assigned a rot name or a wafer name, however, the measured result is assigned an identification name for identifying plural processing apparatuses from one another, and is stored in a database as storage data.
    Type: Grant
    Filed: September 19, 2001
    Date of Patent: April 22, 2003
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Kyoko Asahina, Yoko Miyazaki, Kaoru Yamana
  • Inspection analyzing apparatus and semiconductor device
    Publication number: 20020081756
    Abstract: A monitor wafer is processed by a processing apparatus, and thereafter, it is subjected to an inspection in a foreign object inspection apparatus in accordance with an inspection recipe. A measured result obtained by the inspection is compiled and analyzed in a data management system. Generally, a monitor wafer is not assigned a rot name or a wafer name, however, the measured result is assigned an identification name for identifying plural processing apparatuses from one another, and is stored in a database as storage data.
    Type: Application
    Filed: September 19, 2001
    Publication date: June 27, 2002
    Applicant: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Kyoko Asahina, Yoko Miyazaki, Kaoru Yamana