Patents by Inventor Kyoko Nakazawa

Kyoko Nakazawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • A method of image-wise exposing and developing halogen-containing polyacrylate derivatives
    Patent number: 4822721
    Abstract: Halogen-containing polyacrylate derivatives having the formula: ##STR1## wherein A is a structural unit derived from a copolymeriazable monomer having a double bond; R is ##STR2## wherein each of R.sub.1 and R.sub.2 is a hydrogen atom or a fluorinated methyl group, provided R.sub.1 and R.sub.2 are not hydrogen atoms at the same time, and R.sub.3 is a hydrogen atom or a lower alkyl group; X is a halogen atom or a methyl group; and m is a positive integer, n is 0 or a positive integer, and n/m from 0 to 2, preferably from 0 to 1 are disclosed.Also disclosed are methods for forming a resist pattern by using the halogen-containing polyacrylate derivatives as a resist material.
    Type: Grant
    Filed: November 23, 1987
    Date of Patent: April 18, 1989
    Assignee: Toyo Soda Manufacturing Co., Ltd.
    Inventors: Yoshitaka Tsutsumi, Toru Seita, Hideo Shuyama, Kousaburou Matsumura, Kyoko Nakazawa
  • Halogen-containing polyacrylate derivatives
    Patent number: 4752635
    Abstract: A halogen-containing polyacrylate derivative having the formula: ##STR1## wherein A is a structural unit derived from a copolymerizable monomer having a double bond; R is ##STR2## wherein each of R.sub.1 and R.sub.2 is a hydrogen atom or a fluorinated methyl group, provided R.sub.1 and R.sub.2 are not hydrogen atoms at the same time, and R.sub.3 is a hydrogen atom or a lower alkyl group; X is a halogen atom or a methyl group; and m is a positive integer, n is 0 or a positive integer, and n/m is from 0 to 2, preferably from 0 to 1.
    Type: Grant
    Filed: December 24, 1986
    Date of Patent: June 21, 1988
    Assignee: Toyo Soda Manufacturing Co., Ltd.
    Inventors: Yoshitaka Tsutsumi, Toru Seita, Hideo Shuyama, Kousaburou Matsumura, Kyoko Nakazawa