Patents by Inventor Kyosuke KOTANI

Kyosuke KOTANI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11067380
    Abstract: An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: July 20, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomofumi Suzuki, Kyosuke Kotani, Tatsuya Sugimoto
  • Patent number: 11054309
    Abstract: An optical module 1A includes a mirror unit 2 including a movable mirror 22 and a fixed mirror 16, a beam splitter unit 3, a light incident unit 4, a first light detector 6, a second light source 7, a second light detector 8, a holding unit 130, a first mirror 51, a second mirror 52, and a third mirror 53. The holding unit 130 holds the first light detector 6, the second light detector 8, and the second light source 7 so as to face that same side, and to be aligned in this order. A length of an optical path between the unit 3 and the detector 6 is shorter than a length of an optical path between the unit 3 and the detector 8, and a length of an optical path between the unit 3 and the source 7.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: July 6, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomofumi Suzuki, Kyosuke Kotani, Tatsuya Sugimoto, Yutaka Kuramoto, Katsumi Shibayama, Noburo Hosokawa
  • Patent number: 11048076
    Abstract: A mirror unit includes a mirror device, a light incident/emission portion, and a support portion. The mirror device includes a base, a movable mirror, and a drive unit. The light incident/emission portion includes a first joining portion joined to a region that is located between a first electrode pad and a second electrode pad, and at least one of the movable mirror and the drive unit in a first surface of the base, and a first main body portion. The support portion includes a second joining portion joined to a region that overlaps each of the first electrode pad and the second electrode pad when viewed from a first direction in a second surface of the base, and a second main body portion. The first main body portion is provided with a first light passage region that overlaps a mirror surface of the movable mirror when viewed from the first direction.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: June 29, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya Sugimoto, Tomofumi Suzuki, Kyosuke Kotani, Yutaka Kuramoto
  • Publication number: 20210191106
    Abstract: A method for manufacturing an optical device includes: preparing a semiconductor substrate that includes a portion corresponding to a base, a movable unit, and an elastic support portion; forming a first resist layer in a region corresponding to the base on a surface of a first semiconductor layer which is opposite to an insulating layer; forming a depression in the first semiconductor layer by etching the first semiconductor layer using the first resist layer as a mask; forming a second resist layer in a region corresponding to a rib portion on a bottom surface of the depression, a side surface of the depression, and the surface of the first semiconductor layer which is opposite to the insulating layer; and forming the rib portion by etching the first semiconductor layer until reaching the insulating layer using the second resist layer as a mask.
    Type: Application
    Filed: August 2, 2018
    Publication date: June 24, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI, Yutaka KURAMOTO, Daiki SUZUKI
  • Patent number: 11022492
    Abstract: An optical module 1A includes a mirror unit 2 including a movable mirror 22 and a fixed mirror 16, a beam splitter unit 3, a light incident unit 4, a first light detector 6, a second light source 7, a second light detector 8, a holding unit 130, a first mirror 51, a second mirror 52, and a third mirror 53. The holding unit 130 holds the first light detector 6, the second light detector 8, and the second light source 7 so as to face that same side, and to be aligned in this order. A length of an optical path between the unit 3 and the detector 6 is shorter than a length of an optical path between the unit 3 and the detector 8, and a length of an optical path between the unit 3 and the source 7.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: June 1, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomofumi Suzuki, Kyosuke Kotani, Tatsuya Sugimoto, Yutaka Kuramoto, Katsumi Shibayama, Noburo Hosokawa
  • Publication number: 20210155471
    Abstract: An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 27, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI
  • Publication number: 20210148690
    Abstract: An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 20, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomofumi SUZUKI, Kyosuke KOTANI, Tatsuya SUGIMOTO
  • Publication number: 20210132368
    Abstract: An optical device includes: a base that includes a main surface; a movable unit that includes an optical function unit; and an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface. The elastic support unit includes a lever, a first torsion support portion that extends along a second direction perpendicular to the first direction and is connected between the lever and the movable unit, and a second torsion support portion that extends along the second direction and is connected between the lever and the base. A torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI
  • Publication number: 20210132366
    Abstract: An optical module includes a base which has a main surface and in which a mounting region and a driving region for moving the mounting region along a first direction parallel to the main surface are provided, a movable mirror which has a mirror surface having a positional relationship of intersecting the main surface and is mounted in the mounting region, a first fixed mirror which has a mirror surface having a positional relationship of intersecting the main surface and of which a position with respect to the base is fixed, and a beam splitter unit which constitutes a first interference optical system for measurement light together with the movable mirror and the first fixed mirror. The mirror surface of the movable mirror and the mirror surface of the first fixed mirror are directed to one side in the first direction.
    Type: Application
    Filed: March 14, 2018
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomofumi SUZUKI, Kyosuke KOTANI, Tatsuya SUGIMOTO
  • Publication number: 20210132364
    Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomofumi SUZUKI, Kyosuke KOTANI, Tatsuya SUGIMOTO, Yutaka KURAMOTO, Katsumi SHIBAYAMA, Noburo HOSOKAWA, Hirokazu YAMAMOTO, Takuo KOYAMA
  • Publication number: 20210130159
    Abstract: An optical device includes a base that includes a main surface, a movable unit that includes an optical function unit, an elastic support unit that supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface, a fixed comb electrode that includes a plurality of fixed comb fingers, and a movable comb electrode that includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers. At least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode. The electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI
  • Publication number: 20210130160
    Abstract: An optical device includes: a base; a movable portion including an optical function portion; an elastic support portion supporting the movable portion so that the movable portion is movable along a first direction; a first comb electrode provided to the base and including a plurality of first comb fingers; and a second comb electrode including a plurality of second comb fingers. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI
  • Publication number: 20210132367
    Abstract: An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI
  • Publication number: 20210132330
    Abstract: In an optical device, a movable unit includes a main body portion, a frame portion that surrounds the main body portion with a predetermined interval from the main body portion, and a plurality of connection portions which connect the main body portion and the frame portion to each other. A width of each of the connection portions is larger than an interval between the main body portion and the frame portion, and is smaller than a distance from a connection position with each of the connection portions in the frame portion to any of a connection position with each of a pair of first torsion support portions and a connection position with each of a pair of second torsion support portions.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI
  • Patent number: 10935426
    Abstract: An optical module includes: a mirror unit having a movable mirror and a fixed mirror; a beam splitter unit; a light incident unit that causes measurement light to be incident to the beam splitter unit; a first light detector that detects interference light of the measurement light; a second light source that emits laser light; a second light detector that detects interference light of the laser light; a first mirror that allows the measurement light to be transmitted therethrough and reflects the laser light; a second mirror that reflects a part of the laser light and allows the remainder of the laser light to be transmitted therethrough; a third mirror that reflects the laser light; and a return light suppressing unit that suppresses the laser light from becoming return light, and is disposed on a side opposite to the second optical device with respect to the second mirror.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: March 2, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya Sugimoto, Tomofumi Suzuki, Kyosuke Kotani
  • Publication number: 20200408597
    Abstract: An optical module includes: a mirror unit having a movable mirror and a fixed mirror; a beam splitter unit; a light incident unit that causes measurement light to be incident to the beam splitter unit; a first light detector that detects interference light of the measurement light; a second light source that emits laser light; a second light detector that detects interference light of the laser light; a first mirror that allows the measurement light to be transmitted therethrough and reflects the laser light; a second mirror that reflects a part of the laser light and allows the remainder of the laser light to be transmitted therethrough; a third mirror that reflects the laser light; and a return light suppressing unit that suppresses the laser light from becoming return light, and is disposed on a side opposite to the second optical device with respect to the second mirror.
    Type: Application
    Filed: June 28, 2019
    Publication date: December 31, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI
  • Publication number: 20200409139
    Abstract: An optical module includes: a mirror unit that includes a movable mirror and a fixed mirror, a beam splitter unit that constitutes an interference optical system in combination with the movable mirror and the fixed mirror; a light incident unit that causes measurement light to be incident to the beam splitter unit; a first light detector that detects interference light of the measurement light; a second light source that emits laser light; a second light detector that detects interference light of the laser light; a first mirror that has a function of allowing the measurement light to be transmitted therethrough and reflecting the laser light; a second mirror that has a function of reflecting a part of the laser light and allowing the remainder of the laser light to be transmitted therethrough; a third mirror that has a function of reflecting the laser light; and a first filter that has a function of allowing the measurement light to be transmitted therethrough and cutting off the laser light, and is disposed
    Type: Application
    Filed: June 28, 2019
    Publication date: December 31, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI
  • Publication number: 20200409140
    Abstract: A mirror unit includes a mirror device, a light incident/emission portion, and a support portion. The mirror device includes a base, a movable mirror, and a drive unit. The light incident/emission portion includes a first joining portion joined to a region that is located between a first electrode pad and a second electrode pad, and at least one of the movable mirror and the drive unit in a first surface of the base, and a first main body portion. The support portion includes a second joining portion joined to a region that overlaps each of the first electrode pad and the second electrode pad when viewed from a first direction in a second surface of the base, and a second main body portion. The first main body portion is provided with a first light passage region that overlaps a mirror surface of the movable mirror when viewed from the first direction.
    Type: Application
    Filed: June 28, 2019
    Publication date: December 31, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI, Yutaka KURAMOTO
  • Publication number: 20200363630
    Abstract: In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.
    Type: Application
    Filed: September 4, 2018
    Publication date: November 19, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya SUGIMOTO, Tomofumi SUZUKI, Kyosuke KOTANI
  • Patent number: D901569
    Type: Grant
    Filed: October 18, 2018
    Date of Patent: November 10, 2020
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tatsuya Sugimoto, Tomofumi Suzuki, Kyosuke Kotani