Abstract: Provided is a feedback device providing thermal feedback. The feedback device, according to one embodiment, may comprise a casing, a heat output module, and a feedback controller. The casing comprises: a contact part, with which a user makes contact when the feedback device moves when a content is being played; and a noncontact part with which the user does not make contact even though the feedback device moves. The heat output module comprises: flexible first and second substrates; a thermoelectric element interposed between the first the second substrates and performing a thermoelectric operation for thermal feedback; and a contact surface disposed on the second substrate. The heat output module is disposed on the curve-shaped inside or outside of the contact part, and outputs thermal feedback to the user via the second substrate and the contact surface. The feedback controller is configured so as to control the thermal output module.

Abstract: Disclosed herein are a feedback device and a method of providing thermal feedback using the same. The feedback device according to an embodiment of the present disclosure includes a thermoelectric module including a substrate having flexibility, a thermoelement disposed on the substrate and configured to perform a thermoelectric operation for thermal feedback, and a contact surface disposed on the substrate, and configured to transfer heat generated through the thermoelectric operation to a user through the substrate and the contact surface to output the thermal feedback; and a feedback controller configured to control the thermoelectric module, and wherein the feedback controller controls the thermoelectric module so that, after a temperature of the contact surface reaches a maximum temperature, the temperature of the contact surface is maintained within a predetermined temperature range during an entire thermoelectric operation time interval.

Abstract: An emergency alarm system is provided, including: a mobile communication terminal to measure and transmit a user's bio signal and to output sound data with a bell sound when an emergency alarm signal is received from a health care server; and a health care server to determine from the bio signal whether or not the user is in an emergency, and to transmit an emergency alarm signal to the mobile communication terminal when the user is determined to be in an emergency.

Abstract: An emergency alarm system is provided, including: a mobile communication terminal to measure and transmit a user's bio signal and to output sound data with a bell sound when an emergency alarm signal is received from a health care server; and a health care server to determine from the bio signal whether or not the user is in an emergency, and to transmit an emergency alarm signal to the mobile communication terminal when the user is determined to be in an emergency.

Abstract: A noble method of forming thin films for producing semiconductor or flat panel display devices is disclosed. The method is a way of effectively forming thin films on a substrate even if reactants do not react readily in a time-divisional process gas supply sequence in a reactor by supplying reactant gases and a purge gas cyclically and sequentially in order to prevent gas-phase reactions between the reactant gases and also by generating plasma directly on a substrate synchronously with the process gas supply cycle. The method has advantages of effective thin film formation even if the reactant gases do not react readily, minimization of the purge gas supply time for reduction in process time, reduction of particle contamination during film formation process, as well as thin film formation at low temperatures.

Abstract: A chemical deposition reactor capable of switching rapidly from one process gas to another and method of forming a thin film using the same. The reactor of the present invention comprises: a reactor cover, having an inlet and an outlet, for keeping reactant gases from other part of the reactor where the pressure is lower than inside of the reactor; a gas flow control plate, fixed onto the reactor cover, for controlling the gas flow through inlet and outlet by the spacing between itself and the reactor cover; and a substrate supporting plate for confining a reaction cell with the reactor cover. The method of the present invention can be accomplished using the above reactor. In the method, process gases including a deposition gas, a reactant gas and a purge gas are sequentially and repeatedly supplied in the reactor to form a thin film on a substrate. A RF (Radio Frequency) plasma power is applied to a plasma electrode of the reactor synchronised with the supply of at least one among the process gases.

Abstract: A method for forming a three-component film containing metal, silicon and nitrogen for use in semiconductor devices on a substrate. The method of the present invention comprises the steps of: preparing separate reactive gases each including at least one selected from the group consisting of a gaseous metal compound, a gaseous silicon compound and an ammonia gas under conditions such that the gaseous meta compound and the ammonia gas does not form a mixture; determining a sequential gas supply cycle of the reactive gases so that supplies of the gaseous metal compound, the gaseous silicon compound and the ammonia gas are each included at least once within one gas supply cycle; and applying the reactive gases to the substrate by repeating the gas supply cycle at least once. According to the present invention, a three-component nitride film can be formed with a uniform thickness despite unevenness of a semiconductor substrate surface.

Abstract: A wafer installing cassette for semiconductor manufacturing apparatus is disclosed, in which various sizes of wafer can be installed within a certain range. In the present invention, the wafer installing cassette includes two or more shelves each having a plurality of annular steps, and a shelf securing means for supporting the shelves, so that a plurality of wafers of different sizes can be loaded.