Abstract: A semiconductor device is provided. The semiconductor device includes: a first interlayer insulating film defining a lower wiring trench; a lower wiring structure including a first lower barrier film which extends along sidewalls of the lower wiring trench, and a lower filling film which is on the first lower barrier film; a second interlayer insulating film on the first interlayer insulating film, the second interlayer insulating film defining an upper wiring trench which exposes at least part of the lower wiring structure; and an upper wiring structure provided in the upper wiring trench and connected to the lower wiring structure. An upper surface of the first lower barrier film is closer to a bottom surface of the lower wiring trench than each of an upper surface of the first interlayer insulating film and an upper surface the lower filling film. The upper surface of the first lower barrier film is concave.

Abstract: There are provided a stage for cutting a substrate, and a substrate-cutting apparatus. The stage includes a supporting member for having the substrate mounted thereon, including a plurality of cell areas, and defining a groove line having a groove shape between the plurality of cell areas, and a first tube line inserted into the groove line to contact an inner wall of the groove line, and having an open upper portion.

Abstract: There are provided a stage for cutting a substrate, and a substrate-cutting apparatus. The stage includes a supporting member for having the substrate mounted thereon, including a plurality of cell areas, and defining a groove line having a groove shape between the plurality of cell areas, and a first tube line inserted into the groove line to contact an inner wall of the groove line, and having an open upper portion.

Abstract: Provided is a dual-fuel engine control system including: a sensing unit for generating sensing information by sensing a parameter related to a dual-fuel engine; a main control unit for generating a control signal for controlling a micro-pilot injection value and a gas fuel inlet valve by analyzing a state of the dual-fuel engine on the basis of the sensing information; an EFI control unit for controlling the micro-pilot injection value and the gas fuel inlet valve on the basis of the control signal; and a deep learning unit for analyzing a state of the dual-fuel engine on the basis of the control signal transferred from the main control unit and the sensing information transferred to the main control unit at a time point of generating the control signal, and transferring an analysis result to the main control unit and the EFI control unit.

Abstract: Provided is a dual-fuel engine control system including: a sensing unit for generating sensing information by sensing a parameter related to a dual-fuel engine; a main control unit for generating a control signal for controlling a micro-pilot injection value and a gas fuel inlet valve by analyzing a state of the dual-fuel engine on the basis of the sensing information; an EFI control unit for controlling the micro-pilot injection value and the gas fuel inlet valve on the basis of the control signal; and a deep learning unit for analyzing a state of the dual-fuel engine on the basis of the control signal transferred from the main control unit and the sensing information transferred to the main control unit at a time point of generating the control signal, and transferring an analysis result to the main control unit and the EFI control unit.

Abstract: The present invention relates to an antibody-linker-drug conjugate in which an antibody and a cytotoxic drug are conjugated through an enzyme cleavable peptide linker capable of directly binding to a lysine residue of an antibody, a preparation method therefor, and an anticancer drug composition containing the same as an active ingredient.

Abstract: The present invention relates to an antibody-linker-drug conjugate in which an antibody and a cytotoxic drug are conjugated through an enzyme cleavable peptide linker capable of directly binding to a lysine residue of an antibody, a preparation method therefor, and an anticancer drug composition containing the same as an active ingredient.

Abstract: The present invention relates to the method of optimizing of planar type write heads for ultra high density magnetic recording. More particularly, the invention relates to a planar type write head for an ultra high density drive which can record information on a medium with high magneto-crystalline anisotropy.