Patents by Inventor Kyoung-Yoon Baek

Kyoung-Yoon Baek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overlay key, method of manufacturing the same and method of measuring an overlay degree using the same
    Patent number: 7282422
    Abstract: An overlay key includes a first overlay key having a first main overlay pattern and a first auxiliary pattern, and a second overlay key having a second main overlay pattern and a second auxiliary overlay pattern, the second auxiliary overlay pattern formed at a location corresponding to the first auxiliary overlay pattern.
    Type: Grant
    Filed: July 7, 2005
    Date of Patent: October 16, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyoung-Yoon Baek, Young-Guk Bae
  • Overlay key, method of manufacturing the same and method of measuring an overlay degree using the same
    Publication number: 20050242448
    Abstract: An overlay key includes a first overlay key having a first main overlay pattern and a first auxiliary pattern, and a second overlay key having a second main overlay pattern and a second auxiliary overlay pattern, the second auxiliary overlay pattern formed at a location corresponding to the first auxiliary overlay pattern.
    Type: Application
    Filed: July 7, 2005
    Publication date: November 3, 2005
    Inventors: Kyoung-Yoon Baek, Young-Guk Bae
  • Overlay key, method of manufacturing the same and method of measuring an overlay degree using the same
    Patent number: 6936931
    Abstract: An overlay key includes a first overlay key having a first main overlay pattern and a first auxiliary pattern, and a second overlay key having a second main overlay pattern and a second auxiliary overlay pattern, the second auxiliary overlay pattern formed at a location corresponding to the first auxiliary overlay pattern.
    Type: Grant
    Filed: January 14, 2002
    Date of Patent: August 30, 2005
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyoung-Yoon Baek, Young-Guk Bae
  • Overlay key, method of manufacturing the same and method of measuring an overlay degree using the same
    Publication number: 20020127483
    Abstract: An overlay key includes a first overlay key having a first main overlay pattern and a first auxiliary pattern, and a second overlay key having a second main overlay pattern and a second auxiliary overlay pattern, the second auxiliary overlay pattern formed at a location corresponding to the first auxiliary overlay pattern.
    Type: Application
    Filed: January 14, 2002
    Publication date: September 12, 2002
    Inventors: Kyoung-Yoon Baek, Young-Guk Bae