Abstract: A system for detecting a malfunction of a roughing valve in an ion implantation apparatus, including a valve driving controller, at least one roughing valve having an open-state and a closed-state, at least one solenoid driver electrically connected to the valve driving controller and capable of operating the roughing valve, at least one sensor electrically connected to the valve driving controller, the sensor being capable to determine a state of the roughing valve, a first relay activated by the sensor in response to the state of the roughing valve to transmit a signal, and a main controller electrically connect to the first relay to respond to the transmitted signal.