Abstract: A surface plasmon resonance imaging apparatus is provided. The surface plasmon resonance imaging apparatus includes a light irradiation unit configured to irradiate polarized light onto a metal coating film provided on one surface of a prism, a light modulator configured to spatially pattern-encode light reflected by the metal coating film and the prism, a light detector configured to detect a pattern-encoded light signal, obtained through pattern-encoding by the light modulator, as a spectral signal, a signal processor configured to spatially decode the spectral signal and analyze a decoded spectral signal to generate characteristic data of a sample provided on the metal coating film, and an output unit configured to output the characteristic data of the sample as a two-dimensional (2D) image.

Abstract: The disclosure relates to a non-dispersive infrared (NDIR) gas sensor which detects the concentration of gas with a simple structure and method by manufacturing an optical waveguide with a gas-permeable polymer material instead of a conventional cavity or chamber type. An optical signal travels through the optical waveguide of gas-permeable polymer by total internal reflection, and the gas naturally penetrates the optical waveguide without the use of separate inlet and outlet openings, so that the optical signal and gas particles come into contact with each other within the optical waveguide. Since the optical signal detected by a photodetector at the other end of the optical waveguide after traveling while contacting the gas particles has properties changed according to the concentration of the gas which they have contacted in the optical waveguide, it is possible to measure the concentration of a specific gas from the detected optical signal.

Abstract: A power supply controller is capable of regulating the amount of electrical power supplied to semiconductor fabrication facilities to amounts in accordance with processing conditions of each facility. The apparatus includes a plurality of process status detectors corresponding to the facilities, each status detector detecting an operation mode of each of the facilities and generating a mode detection signal. A plurality of unit controllers are provided, corresponding to the process status detectors, each unit controller generating a power control signal in response to the mode detection signal. A plurality of power supply units are provided, corresponding to the unit controllers, each power supply unit controlling and providing an amount of electrical power from the main power supply to the facilities in response to the power control signal corresponding the operation mode of each facility.

Abstract: A construction capable of easily coupling or disassembling two tubes. The construction has a first annular flange of an enclosing tube protruding radially outward, a telescoped tube inserted in the enclosing tube, a first seal member inserted between an outer surface of the telescoped tube and an outside cylindrical inner surface of the enclosing tube, a second seal member inserted between the outer surface of the telescoped tube and the outside cylindrical inner surface of the enclosing tube after the first seal member is inserted, and a coupler for coupling the enclosing tube and the second seal member.

Abstract: The present invention relates to a tube apparatus for manufacturing a semiconductor device, comprising a one-piece cylindrical tube having a door for loading a semiconductor wafer. One end of the tube is closed and two openings are formed adjacent thereto. The other end is conical and has an opening formed in the apex thereof. A saddle having two openings is mounted on the tube so that the two openings of the saddle correspond to the two openings of the tube which are adjacent to the closed end. Using the tube apparatus enhances the efficiency of a diffusion process. Contaminant residue does not remain in the process tube because the temperature therein is more uniform over the length of the tube, compared to a conventional apparatus. The tube can therefore be used semi-permanently.